Design and fabrication of artificial lateral line flow sensors

Journal of Micromechanics and Microengineering - Tập 12 Số 5 - Trang 655-661 - 2002
Zhifang Fan1, Jack Chen1, Jun Zou1, David Bullen1, Chang Liu1, Fred Delcomyn2
1Micro Actuators, Sensors and Systems Group, Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA
2Department of Entomology, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA

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Tài liệu tham khảo

Bond C E, 1996

Perry A E, 1982

Richter M, 1999, 118

Rediniotis O K, 1999, AIAA J., 37, 666, 10.2514/2.790

Jiang F, 1994, 139

van Baar J J, 2001, J. Micromech. Microeng., 11, 311, 10.1088/0960-1317/11/4/304

Ebefors T, 1998, 93

10.1016/0924-4247(93)80117-Y

Kovacs G T A, 1998

van Honschoten J W, 2001, 523

de Bree H-E, 1999, J. Micromech. Microeng., 9, 186, 10.1088/0960-1317/9/2/320

Lofdahl L, 1992, 12, 270

Svedin N, 2001, 208

van der Wiel A J, 1995, 2, 420

10.1109/84.709647

Enoksson P, 1996, 156

Boillat M A, 1995, 350

Lofdahl L, 1996, 245

10.1016/0924-4247(96)80125-7

10.1109/84.546410

Xu Y, 2002

White F M, 1999

Ayers J, 1998

Ozaki Y, 2000, 531

10.1109/84.925791

Pfann W G, 1961, J. Appl. Phys., 32, 2008, 10.1063/1.1728280

Middelhoek S, 1989