Design and characterization of MIKES metrological atomic force microscope

Precision Engineering - Tập 34 - Trang 735-744 - 2010
V. Korpelainen1, J. Seppä1, A. Lassila1
1Centre for Metrology and Accreditation (MIKES), P.O. Box 9, Tekniikantie 1, 02151 Espoo, Finland

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