Depth-selective 2D-ACAR studies on low-k dielectric thin films

Radiation Physics and Chemistry - Tập 68 - Trang 357-362 - 2003
S.W.H. Eijt1, A. van Veen1, C.V. Falub1, R.Escobar Galindo1, H. Schut1, P.E. Mijnarends1, F.K. de Theije2, A.R. Balkenende2
1Interfaculty Reactor Institute, Delft University of Technology, Mekelweg 15, NL-2629 JB, Delft, Netherlands
2Philips Research Laboratory, Inorganic Materials and Processing, Prof. Holstlaan 4, NL-5656 AA, Eindhoven, Netherlands

Tài liệu tham khảo

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