Defects and hydrogen in amorphous silicon nitride

10.1103/PhysRevLett.34.953

Beyer W., 1987, J. non-crystalline Solids, 97, 1017

Beyer , W. Wagner , H. and Mell , H. Materials Research Society Symposium Proceedings. Vol. 95, pp.317Pittsburgh, Pennsylvania: Materials Research Society.

10.1063/1.103261

10.1103/PhysRevB.42.7420

10.1103/PhysRevB.42.9486

10.1149/1.2113980

10.1063/1.104151

10.1063/1.102514

10.1103/PhysRevLett.70.1654

10.1080/01418639408240115

10.1149/1.2113850

10.1103/PhysRevB.42.5677

Harrison W. A., 1979, Electronic Structure

10.1063/1.104160

10.1063/1.97383

10.1007/BF01447159

10.1063/1.337842

10.1063/1.99438

10.1103/PhysRevLett.59.1037

Kanicki , J. Materials Research Society Symposium Proceedings. Vol. 118, pp.671Pittsburgh, Pennsylvania: Materials Research Society.

10.1063/1.104255

10.1016/S0022-3093(05)80113-9

10.1103/PhysRevB.30.1896

10.1103/PhysRevLett.37.1504

10.1063/1.326447

10.1063/1.341499

Kumeda M., 1991, J. non-crystalline Solids, 137, 880

10.1016/0022-3093(89)90346-3

10.1063/1.103278

10.1016/0169-4332(89)90456-X

Lucovsky G., Materials Research Society Symposium Proceedings, 284, 33

10.1143/JJAP.25.1300

10.1103/PhysRevB.24.5718

McLean F. B., 1988, Ionizing Radiation Effects in MOS Devices and Circuits

10.1143/JJAP.25.L752

10.1002/pssb.2221190233

10.1063/1.93438

10.1103/PhysRevLett.49.223

10.1149/1.2403440

10.1103/PhysRevB.48.10815

Robertson J., 1991, Phil. Mag. B, 63, 7

10.1080/13642818908211192

Smith D. L., 1990, J. Electrochem. Soc., 137, 164

10.1007/BF00899734

Spear W. E., Materials Research Society Symposium Proceedings, 95, 39

10.1016/0038-1098(75)90284-7

10.1149/1.2128790

10.1080/13642818808208515

Street R. A., 1990, Phys. Rev. B

10.1016/0038-1098(80)90780-2

10.1103/PhysRevB.37.4209

10.1103/PhysRevLett.35.1293

10.1103/PhysRevB.40.6236

10.1080/13642818908205926

10.1016/0038-1098(87)90181-5

10.1103/PhysRevB.32.23

10.1063/1.106230

Tober E. D., Materials Research Society Symposium Proceedings, 219, 129

10.1103/PhysRevB.33.7069

10.1063/1.350280

Warren W. L., Materials Research Society Symposium Proceedings, 242, 687

10.1149/1.2069319

10.1063/1.108222

10.1063/1.106222

Warren W. L., Material Research Society Symposium Proceedings, 284, 101

10.1063/1.355315

10.1103/PhysRevLett.65.207

10.1063/1.349433

Warren W. L., 1993, Appl. Phys. Lett.

10.1016/0022-3093(89)90627-3

10.1103/PhysRevLett.63.1487

10.1143/JJAP.32.876

10.1103/PhysRevB.39.3801

Yin Z., 1991, J. non-crystalline Solids, 137, 871