DFT study on dissociative adsorption of SiH4 and GeH4 on SiGe(100)-2×1 surface

Surface Science - Tập 600 - Trang 3194-3201 - 2006
Chia-Liang Cheng1, Dah-Shyang Tsai1, Jyh-Chiang Jiang1
1Department of Chemical Engineering, National Taiwan University of Science and Technology, 43 Keelung Road, Section 4, Taipei 106, Taiwan

Tài liệu tham khảo

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