Critical role of post-annealing in Ta/Co60Fe20B20/Ta thin film heterostructures: Structural, static, and dynamic properties

Parkin, 2003, Magnetically engineered spintronic sensors and memory, Proc. IEEE., 91, 661, 10.1109/JPROC.2003.811807 Maciel, 2020, Magnetic tunnel junction applications, Sensors (Switzerland)., 20, 1 Farkhani, 2018, A Low-Power High-Speed Spintronics-Based Neuromorphic Computing System Using Real-Time Tracking Method, IEEE, J. Emerg. Sel. Top. Circuits Syst., 8, 627, 10.1109/JETCAS.2018.2813389 Vatajelu, 2017, Reliability analysis of MTJ-based functional module for neuromorphic computing, 2017 IEEE 23rd Int, Symp. On-Line Test. Robust Syst. Des. IOLTS, 126 Yakushiji, 2010, High magnetoresistance ratio and low resistance-area product in magnetic tunnel junctions with perpendicularly magnetized electrodes, Appl. Phys. Express., 3, 1, 10.1143/APEX.3.053003 Hirohata, 2020, Review on spintronics: Principles and device applications, J. Magn. Magn. Mater., 509, 166711, 10.1016/j.jmmm.2020.166711 C. Kaiser, Novel materials for magnetic tunnel junctions, Diploma Thesis. (2004) 1–117. papers3://publication/uuid/FD2111E3-ACEF-4849-84A1-4AC3A1A70910. Lee, 2017, Temperature dependence of the interfacial magnetic anisotropy in W/CoFeB/MgO, AIP Adv., 7, 1, 10.1063/1.4985720 M. Yamanouchi, A. Jander, P. Dhagat, S. Ikeda, F. Matsukura, H. Ohno, Domain Structure in CoFeB Thin Films With Perpendicular Magnetic Anisotropy, IEEE Magn. Lett. 2 (2011) 3000304–3000304. https://doi.org/10.1109/LMAG.2011.2159484. Gupta, 2020, Influence of annealing on boron diffusion from obliquely sputtered Co60Fe20B20 thin films, AIP Conf. Proc., 10.1063/5.0024817 Swamy, 2015, Origin of “in-plane” and “out-of-plane” magnetic anisotropies in as-deposited and annealed CoFeB ferromagnetic thin films, J. Appl. Phys., 117, 1, 10.1063/1.4913723 Husain, 2022, Large Dzyaloshinskii-Moriya interaction and atomic layer thickness dependence in a ferromagnet- WS2 heterostructure, Phys. Rev. B., 105, 10.1103/PhysRevB.105.064422 You, 2008, Exchange bias of spin valve structure with a top-pinned Co40 Fe40 B20 IrMn, Appl. Phys. Lett., 93, 012501, 10.1063/1.2956680 Ikeda, 2008, Tunnel magnetoresistance of 604% at 300 K by suppression of Ta diffusion in CoFeBMgOCoFeB pseudo-spin-valves annealed at high temperature, Appl. Phys. Lett., 93, 8, 10.1063/1.2976435 Ikeda, 2010, A perpendicular-anisotropy CoFeB-MgO magnetic tunnel junction, Nat. Mater., 9, 721, 10.1038/nmat2804 Lourembam, 2021, Tuning Damping and Magnetic Anisotropy in Ultrathin Boron-Engineered MgO/Co–Fe–B/MgO Heterostructures, Adv. Electron. Mater., 2100351, 1 Huang, 2008, Spin polarization of amorphous CoFeB determined by point-contact Andreev reflection, Appl. Phys. Lett., 92, 242509, 10.1063/1.2949740 Yuasa, 2007, Giant tunnel magnetoresistance in magnetic tunnel junctions with a crystalline MgO(0 0 1) barrier, J. Phys. D. Appl. Phys., 40, 337, 10.1088/0022-3727/40/21/R01 Choi, 2007, Transmission electron microscopy study on the polycrystalline CoFeBMgOCoFeB based magnetic tunnel junction showing a high tunneling magnetoresistance, predicted in single crystal magnetic tunnel junction, J. Appl. Phys., 101, 013907, 10.1063/1.2407270 Wang, 2010, Understanding tunneling magnetoresistance during thermal annealing in MgO-based junctions with CoFeB electrodes, Phys. Rev. B., 81 Ikeda, 2008, Tunnel magnetoresistance of 604% at 300 K by suppression of Ta diffusion in CoFeBMgOCoFeB pseudo-spin-valves annealed at high temperature, Appl. Phys. Lett., 93, 1, 10.1063/1.2976435 Hayakawa, 2006, Effect of high annealing temperature on giant tunnel magnetoresistance ratio of CoFeB/MgO/CoFeB magnetic tunnel junctions, Appl. Phys. Lett., 89, 1, 10.1063/1.2402904 Lee, 2006, Giant tunnel magnetoresistance and high annealing stability in CoFeB/MgO/CoFeB magnetic tunnel junctions with synthetic pinned layer, Appl. Phys. Lett., 89, 1 Rumaiz, 2010, Effects of annealing on the local structure of Fe and Co in CoFeB/MgO/CoFeB tunnel junctions: An extended x-ray-absorption fine structure study, Appl. Phys. Lett., 96, 112502, 10.1063/1.3364137 E.C.S. Transactions, Structural Study of CoFeB/MgO/CoFeB Magnetic Tunnel Junctions, ECS Meet. Abstr. (2006). https://doi.org/10.1149/ma2006-02/36/1706. P. Khanal, B. Zhou, M. Andrade, Y. Dang, A. Davydov, A. Habiboglu, J. Saidian, A. Laurie, J.-P. Wang, D.B. Gopman, W. Wang, Perpendicular magnetic tunnel junctions with multi-interface free layer, Appl. Phys. Lett. 119 (2021) 242404. https://doi.org/10.1063/5.0066782. Zeng, 2013, Spin transfer nano-oscillators, Nanoscale., 5, 2219, 10.1039/c2nr33407k Xu, 2012, Tuning of magnetization dynamics in sputtered CoFeB thin film by gas pressure, J. Appl. Phys., 111, 07A304, 10.1063/1.3670605 Jhajhria, 2016, Orbital moment probed spin orbit coupling effects on anisotropy and damping in CoFeB thin films, RSC Adv., 6, 94717, 10.1039/C6RA19837F Bilzer, 2006, Study of the dynamic magnetic properties of soft CoFeB films, J. Appl. Phys., 100, 053903, 10.1063/1.2337165 Liu, 2011, Ferromagnetic resonance and damping properties of CoFeB thin films as free layers in MgO-based magnetic tunnel junctions, J. Appl. Phys., 110, 033910, 10.1063/1.3615961 Conca, 2014, Annealing influence on the Gilbert damping parameter and the exchange constant of CoFeB thin films, Appl. Phys. Lett., 104, 1, 10.1063/1.4875927 Devolder, 2013, Damping of CoxFe80-xB20 ultrathin films with perpendicular magnetic anisotropy, Appl. Phys. Lett., 102, 4, 10.1063/1.4775684 Rippard, 2008, Spin transfer precessional dynamics in Co60 Fe20 B20 nanocontacts, J. Appl. Phys., 103, 1, 10.1063/1.2838490 Wang, 2016, Magnetic, thermal, electrical properties and crystallization kinetics of Co60Fe20B20 alloy filmsCo60Fe20B20 alloy films, Sci. China Mater., 59, 639, 10.1007/s40843-016-5052-1 Jhajhria, 2018, Interplay of composition and anisotropy on evolution of microstructural, static and dynamic magnetic properties of CoFeB thin films on annealing, J. Alloys Compd., 763, 728, 10.1016/j.jallcom.2018.05.322 Saravanan, 2018, Effect of thickness on tuning the perpendicular coercivity of Ta/CoFeB/Ta trilayer, J. Mater. Sci. Mater. Electron., 29, 336, 10.1007/s10854-017-7921-3 Xu, 2021, Effects of sputtering parameters and annealing temperatures on magnetic properties of CoFeB films, J. Magn. Magn. Mater., 538, 10.1016/j.jmmm.2021.168302 Saravanan, 2022, Observation of uniaxial magnetic anisotropy and out-of-plane coercivity in W/Co20Fe60B20/W structures with high thermal stability, J. Alloys Compd., 895, 10.1016/j.jallcom.2021.162600 Devolder, 2018, Material developments and domain wall-based nanosecond-scale switching process in perpendicularly magnetized STT-MRAM cells, IEEE Trans. Magn., 54, 1, 10.1109/TMAG.2017.2739187 Gupta, 2022, Impact of Argon working pressure on the magnetic properties of sputtered Co60Fe20B20 thin films, Thin Solid Films., 756, 10.1016/j.tsf.2022.139355 Bhusan Singh, 2012, Effect of MgO spacer and annealing on interface and magnetic properties of ion beam sputtered NiFe/Mg/MgO/CoFe layer structures, J. Appl. Phys., 112, 1, 10.1063/1.4752264 N. Behera, Study of spin pumping and interfacaial anti-damping in Ni81Fe19 (Py)/Ta,W, Al, Cu heterostructures by ferromagnetic resonance, IIT Delhi, 2017. Hait, 2021, Comparison of high temperature growth versus post-deposition in situ annealing in attaining very low Gilbert damping in sputtered Co2FeAl Heusler alloy films, J. Magn. Magn. Mater., 519, 10.1016/j.jmmm.2020.167509 Rumaiz, 2011, Boron migration due to annealing in CoFeB/MgO/CoFeB interfaces: A combined hard x-ray photoelectron spectroscopy and x-ray absorption studies, Appl. Phys. Lett., 99, 10, 10.1063/1.3662967 Ellis, 2018, Effect of sputter pressure on Ta thin films: Beta phase formation, texture, and stresses, Acta Mater., 150, 317, 10.1016/j.actamat.2018.02.050 Bouchikhaoui, 2013, On the role of Ta cap in the recrystallization process of CoFeB layers, Appl. Phys. Lett., 103, 142412, 10.1063/1.4824033 Gupta, 2013, Evolution of structural and magnetic properties of amorphous CoFeB film with thermal annealing, J. Appl. Phys., 114, 063903, 10.1063/1.4817882 Schoen, 2016, Ultra-low magnetic damping of a metallic ferromagnet, Nat. Phys., 12, 839, 10.1038/nphys3770 Pandey, 2022, Weak antilocalization and electron-electron interactions in topological insulator BixTey films deposited by sputtering on Si(100), Phys. Rev. Mater., 6 Patterson, 1939, The scherrer formula for X-ray particle size determination, Phys. Rev., 56, 978, 10.1103/PhysRev.56.978 Zhang, 2011, Study and tailoring spin dynamic properties of CoFeB during rapid thermal annealing, Appl. Phys. Lett., 98, 1 G. Herzer, V. Gmbh, D.- Hanau, F.R. Germany, GRAIN S I Z E DEPENDENCE OF COERCIVITY AND PERMEABILITY, 26 (1990) 1397–1402. Raju, 2013, Effect of interface on magnetic properties of Co20Fe 60B20 in ion-beam sputtered Si/CoFeB/MgO and Si/MgO/CoFeB bilayers, J. Magn. Magn. Mater., 332, 109, 10.1016/j.jmmm.2012.12.022 Goyat, 2022, Large exchange bias and spin pumping in ultrathin IrMn/Co system for spintronic device applications, Appl. Surf. Sci., 588, 10.1016/j.apsusc.2022.152914 Mallik, 2018, Study of anisotropy, magnetization reversal and damping in ultrathin Co films on MgO (0 0 1) substrate, J. Magn. Magn. Mater., 446, 270, 10.1016/j.jmmm.2017.09.035 Li, 2019, Giant Anisotropy of Gilbert Damping in Epitaxial CoFe Films, Phys. Rev. Lett., 122, 1, 10.1103/PhysRevLett.122.117203 Mohammadi, 2019, Reduced Exchange Interactions in Magnetic Tunnel Junction Free Layers with Insertion Layers, ACS Appl. Electron. Mater., 1, 2025, 10.1021/acsaelm.9b00381 Bai, 2008, The rf magnetic-field vector detector based on the spin rectification effect, Appl. Phys. Lett., 92, 032504, 10.1063/1.2837180 Hait, 2021, Influence of annealing temperature and capping layer on the structural, magnetic and transport properties of ion beam sputtered Co2FeAl thin films on Si (100), Appl. Surf. Sci., 572 Kittel, 1948, On the theory of ferromagnetic resonance absorption, Phys. Rev., 73, 155, 10.1103/PhysRev.73.155 Barwal, 2022, Effect of stoichiometry and film thickness on the structural and magnetization dynamics behavior of Co2MnAl thin films cosputtered on Si(1 0 0), J. Magn. Magn. Mater., 552, 10.1016/j.jmmm.2022.169246 Jin, 2013, Effects of ruthenium seed layer on the microstructure and spin dynamics of thin permalloy films, J. Appl. Phys., 113, 053902, 10.1063/1.4790133 González-Guerrero, 2007, Engineering the magnetic properties of amorphous (Fe80Co 20)80B20 with multilayers of variable anisotropy direction, Appl. Phys. Lett., 90, 1, 10.1063/1.2724752 Klemmer, 2000, Ultrahigh frequency permeability of sputtered Fe-Co-B thin films, J. Appl. Phys., 87, 830, 10.1063/1.371949 Yu, 2005, Development of FeCo-based thin films for gigahertz applications, IEEE Trans. Magn., 41, 3259, 10.1109/TMAG.2005.854667 Chaturvedi, 2016, Magnetic and structural properties of MnRh thin films, AIP Adv., 6, 2302, 10.1063/1.4944405 Wang, 2016, Investigation of magnetic properties in thick CoFeB alloy films for controllable anisotropy, Appl. Phys. A Mater. Sci. Process., 122, 1 Husain, 2019, Multi-jump magnetization switching in Co2FeAl full Heusler alloy thin films: Experiments and simulations, J. Magn. Magn. Mater., 486, 10.1016/j.jmmm.2019.165258 O’Dell, 2019, Substrate heating effects on composition, structure and ferromagnetic resonance properties of CoFeB thin films, J. Magn. Magn. Mater., 476, 516, 10.1016/j.jmmm.2018.12.084 F. Zighem, D. Faurie, M. Belmeguenai, N. Girodon-Boulandet, M.S. Gabor, P. Djemia, Annealing effect on elastic, magnetic and magnetoelastic properties of CoFeB thin films on polymer substrate, J. Phys. D. Appl. Phys. 50 (2017) 455002. https://doi.org/10.1088/1361-6463/aa8d0b. Barwal, 2020, Structural and magneto-transport properties of co-sputtered MnAl thin films, J. Magn. Magn. Mater., 503, 10.1016/j.jmmm.2020.166654 Mishra, 2022, Investigation of spin gapless semiconducting behaviour in quaternary CoFeMnSi Heusler alloy thin films on Si (1 0 0), J. Magnetism Magnetic Mater., 547, 168837, 10.1016/j.jmmm.2021.168837 Sharma, 2020, Crystallization of optically thick films of CoxFe80-x B20: Evolution of optical, magneto-optical, and structural properties, Phys. Rev. B., 101, 54438, 10.1103/PhysRevB.101.054438 Neeraj, 2022, Terahertz charge and spin transport in metallic ferromagnets: The role of crystalline and magnetic order, Appl. Phys. Lett., 120, 102406, 10.1063/5.0067443