Critical factors in quantitative Atomic Force Acoustic Microscopy

De Chiffre, 2003, Surfaces in Precision Engineering, Microengineering and Nanotechnology, Annals of the CIRP, 52, 561, 10.1016/S0007-8506(07)60204-2 Hoffmann, 2008, Electrical Probing for Dimensional Micro Metrology, CIRP Journal of Manufacturing Science and Technology, 1, 59, 10.1016/j.cirpj.2008.06.002 Bruzzone, 2008, Advances in Engineered Surfaces for Functional Performance, Annals of the CIRP, 57, 750, 10.1016/j.cirp.2008.09.003 Golovin, 2008, Nanoindentation and Mechanical Properties of Solids in Submicrovolumes, Thin Near-surface Layers, and Films: A Review, Physics of the Solid State, 50, 2205, 10.1134/S1063783408120019 Danzebrink, 2006, Advances in Scanning Force Microscopy for Dimensional Metrology, Annals of the CIRP, 55, 841, 10.1016/j.cirp.2006.10.010 Marinello, F., 2007, Atomic Force Microscopy in Nanometrology: Modeling and Enhancement of the Instrument, PhD Dissertation, University of Padova and Technical University of Denmark, http://paduaresearch.cab.unipd.it/1295. Hurley, 2005, Nanoscale Elastic-property Measurements and Mapping Using Atomic Force Acoustic Microscopy Methods, Measurement Science & Technology, 16, 2167, 10.1088/0957-0233/16/11/006 Kopycinska-Müller, 2008, Quantitative Evaluation of Elastic Properties of Nano-Crystalline Nickel Using Atomic Force Acoustic Microscopy AFM Modeling MST, Zeitschrift fur Physikalische Chemie, 222, 471, 10.1524/zpch.2008.222.2-3.471 Passeri, 2008, Atomic Force Acoustic Microscopy Characterization of Nanostructured Selenium-Tin Thin Films, Superlattices and Microstructures, 44, 641, 10.1016/j.spmi.2007.10.004 Passeri, 2005, Effect of Tip Geometry on Local Indentation Modulus Measurement Via Atomic Force Acoustic Microscopy Technique, Review of Scientific Instruments, 76, 093904, 10.1063/1.2044607 Kopycinska-Müller, 2006, Contact Mechanics and Tip Shape in AFM-based Nanomechanical Measurements, Ultramicroscopy, 106, 466, 10.1016/j.ultramic.2005.12.006 Marinello, 2010, Atomic Force Acoustic Microscopy for Quantitative Nanomechanical Characterization, Wear Marinello, 2009, Geometrical Modelling of Scanning Probe Microscopes and Characterization of Errors, Measurement Science & Technology, 20, 084002, 10.1088/0957-0233/20/8/084002