Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal–organic chemical vapor deposition

Materials Science in Semiconductor Processing - Tập 27 - Trang 841-845 - 2014
Pengcheng Tao1, Hongwei Liang1, Dongsheng Wang1, Xiaochuan Xia1, Qiuju Feng, Yang Liu1, Rensheng Shen1, Kexiong Zhang1, Yingmin Luo1, Wenping Guo2, Qunxiong Deng2, Guotong Du1,3
1School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian 116024, China
2Jiangsu Xinguanglian Technology Co. Ltd., Wuxi 214192, China
3State Key Laboratory on Integrated Optoelectronics, School of Electronic Science and Engineering, Jilin University, Changchun 130012, China

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