Contact holes in vertical electrode structures analyzed by voltage contrast-SEM and conducting AFM

Current Applied Physics - Tập 53 - Trang 46-50 - 2023
Minseon Gu1, Moon Seop Hyun2, Moonsup Han1, Gyungtae Kim2, Young Jun Chang1,3,4
1Department of Physics, University of Seoul, Seoul, 02504, Republic of Korea
2National NanoFab Center (NNFC), 34141, Republic of Korea
3Department of Smart Cities, University of Seoul, Seoul, 02504, Republic of Korea
4Department of Intelligent Semiconductor Engineering, University of Seoul, Seoul, 02504, Republic of Korea

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Current Applied Physics

Tập 53

46-50

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