Construction of Nonlinear Dynamic MEMS Component Models Using Cosserat Theory
Tóm tắt
This paper presents a new modelling method for MEMS components based on the Cosserat theory. By constructing Cosserat rod elements, generating symbolic code and developing numeric code in VHDL-AMS for selected demonstrators, we are able to effectively simulate and predict the essential linear and nonlinear behaviour in estimating system performance and guiding the reliability verification process. The simplicity of the Cosserat approach follows from the possibility to formulate interconnected slender components in terms of a network of quasi-rigid bodies (Cosserat elements). This modularization fits well into the behavioural modelling where a relatively low degree of freedom is needed to capture salient features of the system. Furthermore, the manner in which Cosserat elements and their interactions are formulated makes this method ideally suited for nonlinear dynamic simulations in the presence of large deflections.
Tài liệu tham khảo
G. Lorenz and R. Neul, “Network-type modeling of micromachined sensor systems.” In Proc.of the MSM, Santa Clara, April 1998, pp. 233–238.
T. Mukherjee, G.K. Fedder, and R.D. Blanton, “Hierarchical design and test of integrated microsystems.” IEEE Design and Test of Computers, vol. 16, no. 4, pp. 18–27, 1999.
CoventorWare of Coventor Inc. http://www.coventor.com.
MEMSMaster of MEMSCAP, http://www.memscap.com.
B. Librovich, R.W Tucker, and C. Wang, “On gear modelling in multistage rotary vane engines.” Meccanica, to appear in, 2003.
R.W. Tucker and C. Wang, “Torsional vibration control and cosserat dynamics of a drill-rig assembly.” Meccanica, vol. 38 pp. 143–159, 2003.
A. Balanov, N. Janson, P.V.E. McClintock, R.W. Tucker, and C. Wang, “Bifurcation analysis of a neutral delay differential.Construction of Nonlinear Dynamic MEMS Component Models Using Cosserat Theory 129 equation modelling the torsional motion of a driven drill string.” Chaos, Solitons and Fractals, vol. 15, pp. 381–394, 2003.
R. Rosing, C. Wang, R. Tucker, A. Richardson, and B. De Masi, “Generation of MEMS component models using Cosserat symbolic simulations.” In Proc.of SPIE DTIP Symposium, Cannes Mandelieu, France, May 5–8, 2002, pp. 149–154.
C. Wang, D. Liu, R. Rosing, A. Richardson, and B. De Masi, “Construction of nonlinear dynamic MEMS component models using Cosserat theory.” In Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes Mandelieu, France, May 5–7 2003, pp. 131–136.