Comparative study on the specimen thickness measurement using EELS and CBED methods

Springer Science and Business Media LLC - 2020
Yoon-Uk Heo1
1Graduate Institute of Ferrous Technology, Pohang University of Science and Technology, Cheongam-Ro 77, Hyoja dong, Pohang, 37-673, Republic of Korea

Tóm tắt

AbstractTwo thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the $$ \mathbf{13}\overline{\mathbf{1}} $$131¯ diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72 ~ 113 nm with a difference of less than 5%.

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