Compact curved-edge displacement sensor-embedded spindle system for machining process monitoring

Kim, 2013, Rolling bearing-suspended spindle run-out control using repetitive control and adaptive feedforward cancellation. Inter feedforward cancellation, Int J Precis Eng Manuf, 14, 2171, 10.1007/s12541-013-0294-5 Marsh, 2010 Costa, 2020, Guidelines for machine tool sensing and smart manufacturing integration, Procedia Manuf, 51, 251, 10.1016/j.promfg.2020.10.036 Lee, 2019, An optical measurement technique for dynamic stiffness and damping of precision spindle system, Measurement, 131, 61, 10.1016/j.measurement.2018.08.049 Lee, 2016, A curved edge diffraction-utilized displacement sensor for spindle metrology, Rev Sci Instrum, 87, 10.1063/1.4958882 Lee, 2017, A simple optical system for miniature spindle runout monitoring, Measurement, 102, 42, 10.1016/j.measurement.2017.01.056 Smith, 2005, Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts, Precis Eng, 29, 324, 10.1016/j.precisioneng.2004.11.010 Ryan Vallance, 2004, Effects of spherical targets on capacitive displacement measurements, ASME, J Manuf Sci Eng, 126, 822, 10.1115/1.1813476 Slatter, 2016, Magnetoresistive sensors for the condition monitoring of high-frequency spindles, Procedia Cirp, 46, 177, 10.1016/j.procir.2016.03.161 Postel, 2019, Monitoring of vibrations and cutting forces with spindle mounted vibration sensors, CIRP Ann Manuf Technol, 68, 413, 10.1016/j.cirp.2019.03.019 Liu, 2004, Development of a simple test device for spindle error measurement using a position sensitive detector, Meas Sci Technol, 15, 1733, 10.1088/0957-0233/15/9/009 Castro, 2008, A method for evaluating spindle rotation errors of machine tools using a laser interferometer, Measurement, 41, 526, 10.1016/j.measurement.2007.06.002 Guo, 2020, Cosine error elimination method for 1-dimensional convex and concave surface profile measurements, ASME, J Manuf Sci Eng, 142, 10.1115/1.4046078 Guo, 2021, Cosine error-free metrology tool path planning for thickness profile measurements, ASME, J Manuf Sci Eng, 143, 041006, 10.1115/1.4048433 Lee, 2014, Novel design and sensitivity analysis of displacement measurement system utilizing knife edge diffraction for nanopositioning stages, Rev Sci Instrum, 85, 10.1063/1.4895912