Coating technology based on the vacuum arc-a review

IEEE Transactions on Plasma Science - Tập 18 Số 6 - Trang 883-894 - 1990
Dean Sanders1, David B. Boercker1, S. Falabella2
1Lawrence Livermore National Lab, CA, USA
2[KMI Energy Services, Inc., Livermore, CA, USA]

Tóm tắt

Từ khóa


Tài liệu tham khảo

10.1016/0168-9002(86)91254-4

chernyaev, 1982, The manufacture of strip-line microwave devices using pulsed plasma accelerators, Izv Vyssh Ucheb Zaved Radiofiz, 25, 68

10.1109/PROC.1972.8821

10.1063/1.88827

10.1063/1.334684

10.1063/1.328745

10.1063/1.96163

10.1063/1.1138660

10.1016/0040-6090(86)90046-5

maslov, 1985, Pulsed carbon-plasma source for production processes, Prib Tekh Eksp, 146

10.1109/27.41174

10.1109/27.41177

10.1557/JMR.1989.0343

1984, Method and apparatus for evaporating material under vacuum using both arc discharge and electron beam

saenko, 1985, Hollow-cathode evaporators, Instrum Exp Tech (USSR), 28, 234

dorodnov, 1979, New a node-vapor vacuum arc with a permanent hollow cathode, Sov Tech Phys Lett, 5, 418

10.1116/1.1318624

10.1007/BF01160796

demidenko, 1984, Ionization mechanism for nitrogen in a vacuum arc discharge, Sov Phys -Tech Phys, 29, 895

ehrich, 1988, Vacuum arcs with consumable anodes and their application to coating, Vakuum-Technik, 37, 176

10.1063/1.341468

10.1116/1.574995

10.1109/27.41176

10.1109/TPS.1987.4316742

radie, 1989, Plasma parameters within the cathodic spot of the vacuum arc, IEEE Trans Plasma Sci, 17, 679

lunev, 1977, Plasma properties of a metal vacuum arc II, Sov Phys -Tech Phys, 22, 858

10.1109/27.41181

10.1016/0020-7381(74)80071-9

10.1109/TPS.1983.4316256

10.1109/27.41183

harris, 1980, Vacuum Arcs Theory and Application

10.1103/PhysRev.69.96

10.1016/0168-583X(87)90826-3

10.1109/27.41186

10.1016/0040-6090(88)90494-4

dorodnov, 1978, Technical applications of plasma accelerators, Sov Phys -Tech Phys, 23, 1058

randawa, 1987, Cathodic arc deposition advances coating technology, J Res & Dev, 29, 173

10.1116/1.575939

10.1109/27.41172

dorodnov, 1981, Physical principles and types of technological vacuum plasma devices, Sov Phys -Tech Phys, 26

compton, 1927, AIEE Trans, 46, 868

10.1063/1.1662710

daalder, 1978, Cathode erosion of metal vapour arcs in vacuum

lunev, 1977, Plasma properties of a metal vacuum arc I, Sov J Plasma Phys, 22, 856

10.1109/TPS.1987.4316718

10.1109/TPS.1987.4316740

10.1063/1.1138660

10.1109/TPS.1982.4316198

10.1109/TPS.1987.4316741

10.1017/S0022377800012423

1985, Plasma arc apparatus for applying coatings by means of consumable cathode

10.1116/1.575251

palatnik, 1986, Vacuum condensates of niobium produced by sputtering the target with accelerated Nb ions, Phys Chem Mater Treat, 20, 240

10.1103/PhysRevLett.46.36

10.1063/1.338407

10.1063/1.861601

10.1017/S002237780002554X

10.1063/1.343914

10.1063/1.338976

aksenov, 1985, Droplet phase of cathode erosion in a steady vacuum arc, Sov Phys -Tech Phys, 29, 893

10.1109/TPS.1983.4316236

10.1088/0022-3727/11/13/014

10.1109/27.41170

10.1109/TPS.1983.4316235

10.1109/TPS.1983.4316234

aksenov, 1977, Motion of the cathode spot of a vacuum arc in an inhomogeneous magnetic field, Sov Tech Phys Lett, 3, 525

1985, Controlled vacuum arc material deposition method and apparatus

10.1016/0257-8972(87)90177-0

10.1016/0257-8972(86)90001-0

10.1016/S0257-8972(89)80007-6

1982

10.1063/1.99435

10.1103/PhysRevB.31.5262

10.1007/BF01730760

10.1103/PhysRevB.29.6443

strel'nitskii, 1978, Properties of diamond-like carbon coating produced by plasma condensation, Sov Tech Phys Lett, 4, 546

10.1116/1.574945

strel'nitskii, 1978, Properties of the diamond-like carbon film produced by the condensation of a plasma stream with a RF potential, Sov Phys - Tech Phys, 23, 222

10.1116/1.573468

10.1016/B978-0-12-410755-7.50010-5

1989, Advances in Chem Phys, lxxvi

10.1116/1.575931

10.1063/1.343711

10.1016/0257-8972(88)90154-5

10.1016/0040-6090(87)90173-8

popov, 1986, Influence of the nitrogen partial pressure on the composition and color of titanium nitride coatings, obtained by reactive magnetron sputtering and reactive arc evaporation, Bulg J Phys (Bulgaria), 13, 470

10.1116/1.576911

10.1103/PhysRevLett.55.2471

10.1016/0040-6090(85)90333-5

cobine, 1980, Vacuum Arcs Theory and Application, 1

10.1364/AO.24.002267

10.1016/0040-6090(83)90003-2

martin, 1983, Ion-assisted deposition of bulklike ZrO<subscript>2</subscript> films, Phys Rev Lett, 43, 711

10.1063/1.336960

10.1007/BF00616596

10.1063/1.339559

10.1063/1.864224

bunshah, 1987, Physics of Thin Films, 13, 59, 10.1016/B978-0-12-533013-8.50007-7

10.1103/PhysRevLett.48.149

10.1063/1.332871

10.1063/1.866182

vasin, 1979, Vacuum arc with a distributed discharge on an expendable cathode, Sov Phys -Tech Phys, 5, 634

10.1063/1.336445

10.1063/1.866430

10.1088/0741-3335/28/5/002

morozov, 1966, Focusing of cold quasi-neutral beams in electromagnetic fields, Sov Phys -Dokl, 10, 775

morozov, 1980, Reviews of Plasma Physics, 8

aksenov, 1980, Motion of plasma streams from a vacuum arc in a long, straight plasma-optics system, Sov J Plasma Phys, 6, 504

aksenov, 1978, Transport of plasma streams in a curvilinear plasma-optics system, Sov J Plasma Phys, 4, 425