Chemical vapour deposition of diamond in RF glow discharge

Journal of Materials Science Letters - Tập 4 Số 5 - Trang 600-602 - 1985
Shinya Matsumoto1
1National Institute for Research in Inorganic Materials, Namiki 1-1, 305, Sakura-mura, Ibaraki-ken, Japan

Tóm tắt

Từ khóa


Tài liệu tham khảo

B. V. SPITYN, L. L. BOUILOV and B. V. DERJAGUIN,J. Cryst. Growth 52 (1981) 219.

R. MANIA, L. STOBIERSKI and R. PAMPUCH,Cryst. Res. Technol. 16 (1981) 785.

S. MATSUMOTO, Y. SATO, M. KAMO and N. SETAKA,Jpn. J. Appl. Phys. 21 (1982) L183.

S. MATSUMOTO, Y. SATO, M. TSUTSUMI and N. SETAKA,J. Mater. Sci. 17 (1982) 3106.

M. KAMO, Y. SATO, M. MATSUMOTO and N. SETAKA,J. Cryst. Growth 62 (1983) 642.

K. KIJIMA, S. MATSUMOTO and N. SETAKA, Proceedings of the International Ion Engineering Congress (1983) p. 1417.

M. KONUMA and O. MATSUMOTO,J. Less-Common Met. 52 (1977) 145.

S. MATSUMOTO, Y. SATO, M. KAMO, J. TANAKA and N. SETAKA, Proceedings of the 7th International Conference on Vacuum Metallurgy (1982) p. 386.