Chemical vapor deposition of structural ceramic materials

JOM - Tập 28 - Trang 6-10 - 2014
J. E. Doherty

Tóm tắt

The mechanical properties of chemically vapor deposited SiC warrant CVD as a potential fabrication process for gas turbine applications. A look at some of the key factors involved.

Tài liệu tham khảo

Kohler, W. A., Met. Trans., 1, 735 (1970). MacKenna, E., and Kodama, P., J. Electrochem Soc., 119, 1094 (1972). Auck, Y. T., and Byrne, J. G., J. Mat. Sci., 8, 559 (1973). Meyerson, G. A., Niselson, L. A., and Chu-Ming, Chou, Russ. Met. and Mining, 1964, 31 Messier, D. R., and Wong, P., Ceram. Bull, 49, No. 2, 216 (1970). JANAF Thermochemical Tables Stull, D. R., ed., Gull Clearing House Document PB 168 370. Hunt, L. P., and Stirtle, E., p. 3 Proc 2nd International Conf. on CVD, ed., Blocker, J. M., and Withers, J. C., (1970). Susman, S., Spriggs, R., and Weber, H. S., p. 95, Proc. Conf. on SiC, ed., O’Connor, J. R., and Smiltens, J., (1960). Pearce, M. L., and Marek, R. W., J. Am. Ceram. Soc., 51, 84 (1968). McAdams, W. H., Heat Transmission, p. 153, McGraw Hill (1954). Lydrin, H., p. 71, Proc. 2nd Inter. Conf. on CVD, ed., Blocher, J. M., and Withers, J. C., (1970). Grisdale, R. O., Pfister, A. C., and van Roosbroech, W., Bell System. Tech. J., 30, 271 (1951). Stech, S. J., Pressley, G. A., Lin, S., and Stafford, F. E., J. Chem. Phys.,.50, 3196 (1959). Meyerson, G. A., Niselson, L. A., and Chu-Ming, Chou, Russ. Met. and Mining, 1964, 31. Sinkovskii, A. S., Zemshov, G. V., and Smekh, E. V., Proshkovaya Mettallurgiya, 1967, No. 12, 33. Spruiell, J. E., p. 279, Proc. 2nd Inter. Conf. on CVD, ed., Blocher, J. M., and Withers, J. C., (1970). Harris, J. M., Gatos, J. C., and Witt, A. F., J. Electrochem., 338 (1971). Gulden, T. D., J. A. Ceram. Soc. 52, 585 (1969). Weiss, J. R., Dietendorf, R. J., 4th Internat. Conf. on CVD, Wakefield, G. F., and Blocher, J. M., ed., p. 488 (1973).