Chemical Vapor Deposition of Niobium in the NbCl5–H2–O2 System

Inorganic Materials - Tập 38 - Trang 895-899 - 2002
V. P. Kobyakov1
1Institute of Structural Macrokinetics and Materials Research Problems, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia

Tóm tắt

Chemical vapor deposition of niobium from NbCl5–H2–O2 mixtures onto heated substrates was studied. Data are presented on the microstructure, phase composition, and microhardness of metastable oxygen-containing Nb.

Tài liệu tham khảo

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