Characterization of the Response of Magnetron Sputtered In2O3−x Sensors to NO2
Tóm tắt
The response of resistive In2O3−x sensing devices was investigated as a function of the NO2 concentration in different operative conditions. Sensing layers are 150 nm thick films manufactured by oxygen-free room temperature magnetron sputtering deposition. This technique allows for a facile and fast manufacturing process, at same time providing advantages in terms of gas sensing performances. The oxygen deficiency during growth provides high densities of oxygen vacancies, both on the surface, where they are favoring NO2 absorption reactions, and in the bulk, where they act as donors. This n-type doping allows for conveniently lowering the thin film resistivity, thus avoiding the sophisticated electronic readout required in the case of very high resistance sensing layers. The semiconductor layer was characterized in terms of morphology, composition and electronic properties. The sensor baseline resistance is in the order of kilohms and exhibits remarkable performances with respect to gas sensitivity. The sensor response to NO2 was studied experimentally both in oxygen-rich and oxygen-free atmospheres for different NO2 concentrations and working temperatures. Experimental tests revealed a response of 32%/ppm at 10 ppm NO2 and response times of approximately 2 min at an optimal working temperature of 200 °C. The obtained performance is in line with the requirements of a realistic application scenario, such as in plant condition monitoring.
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Zandalinas, 2021, Global Warming, Climate Change, and Environmental Pollution: Recipe for a Multifactorial Stress Combination Disaster, Trends Plant Sci., 26, 588, 10.1016/j.tplants.2021.02.011
Dhall, 2021, A review on environmental gas sensors: Materials and technologies, Sens. Int., 2, 100116, 10.1016/j.sintl.2021.100116
Raju, 2022, Review—Semiconductor Materials and Devices for Gas Sensors, J. Electrochem. Soc., 169, 057518, 10.1149/1945-7111/ac6e0a
Dey, 2018, Semiconductor metal oxide gas sensors: A review, Mater. Sci. Eng. B, 229, 206, 10.1016/j.mseb.2017.12.036
Mirzaei, 2019, Resistive gas sensors based on metal-oxide nanowires, J. Appl. Phys., 126, 241102, 10.1063/1.5118805
Nikolic, M.V., Milovanovic, V., Vasiljevic, Z.Z., and Stamenkovic, Z. (2020). Semiconductor Gas Sensors: Materials, Technology, Design, and Application. Sensors, 20.
Abbatangelo, M., Núñez-Carmona, E., Sberveglieri, V., Zappa, D., Comini, E., and Sberveglieri, G. (2020). An Array of MOX Sensors and ANNs to Assess Grated Parmigiano Reggiano Cheese Packs’ Compliance with CFPR Guidelines. Biosensors, 10.
Essl, C., Seifert, L., Rabe, M., and Fuchs, A. (2021). Early Detection of Failing Automotive Batteries Using Gas Sensors. Batteries, 7.
Han, 2018, Highly sensitive NO2 gas sensor of ppb-level detection based on In2O3−x nanobricks at low temperature, Sens. Actuators B Chem., 262, 655, 10.1016/j.snb.2018.02.052
Cappelli, 2021, Battery-Less HF RFID Sensor Tag for Soil Moisture Measurements, IEEE Trans. Instrum. Meas., 70, 9249048, 10.1109/TIM.2020.3036061
Tan, X.Q., Liu, J.Y., Niu, J.R., Liu, J.Y., and Tian, J.Y. (2018). Recent Progress in Magnetron Sputtering Technology Used on Fabrics. Materials, 11.
Jian, 2019, Surface Morphology-Dependent Sensitivity of Thin-Film-Structured Indium Oxide-Based NO2 Gas Sensors, J. Electron. Mater., 48, 2391, 10.1007/s11664-019-06945-w
Gogotsi, Y.G., and Uvarova, I.V. (2003). Nanostructured Materials and Coatings for Biomedical and Sensor Applications, NATO Science Series, 102, Springer.
Simonenko, N.P., Fisenko, N.A., Fedorov, F.S., Simonenko, T.L., Mokrushin, A.S., Simonenko, E.P., Korotcenkov, G., Sysoev, V.V., Sevastyanov, V.G., and Kuznetsov, N.T. (2022). Printing Technologies as an Emerging Approach in Gas Sensors: Survey of Literature. Sensors, 22.
Zhu, 2023, Influence of magnetron sputtering process on the stability of WO3-X thin film gas sensor, Mater. Today Commun., 34, 105116, 10.1016/j.mtcomm.2022.105116
Rydosz, A., Brudnik, A., and Staszek, K. (2019). Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range. Materials, 12.
Nafarizal, 2015, Influence of Oxygen Flow Rate on Sputter Deposition Rate and SEM Image of Copper Oxide Thin Films, Appl. Mech. Mater., 773–774, 711, 10.4028/www.scientific.net/AMM.773-774.711
Yuan, Z., Yang, F., and Meng, F. (2022). Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor. Micromachines, 13.
Zhang, 2019, Room temperature conductive type metal oxide semiconductor gas sensors for NO2 detection, Sens. Actuators A Phys., 289, 118, 10.1016/j.sna.2019.02.027
Li, 2022, Metal oxide gas sensors for detecting NO2 in industrial exhaust gas: Recent developments, Sens. Actuators B Chem., 359, 131579, 10.1016/j.snb.2022.131579
Kumar, 2020, A review on 2D transition metal di-chalcogenides and metal oxide nanostructures based NO2 gas sensors, Mater. Sci. Semicond. Process., 107, 104865, 10.1016/j.mssp.2019.104865
Mbaye, 2023, Solution-Processed Functionalized Graphene Film Prepared by Vacuum Filtration for Flexible NO2 Sensors, Sensors, 4, 1831
Akbar, 2019, Role of Oxygen Vacancies in Nanostructured Metal-Oxide Gas Sensors: A Review, Sens. Actuators B Chem., 301, 126845, 10.1016/j.snb.2019.126845
Dong, 2020, A review on WO3 based gas sensors: Morphology control and enhanced sensing properties, J. Alloys Compd., 820, 153194, 10.1016/j.jallcom.2019.153194
Maksimova, N., Malinovskaya, T., Zhek, V., Sergeychenko, N., Chernikov, E., Lapin, I., and Svetlichnyi, V. (2023). Hydrogen Sensors Based on In2O3-X Thin Films with Bimetallic Pt/Pd Catalysts on the Surface and Tin and Dysprosium Impurities in the Bulk. Chemosensors, 11.
Addabbo, T., Bruzzi, M., Fort, A., Mugnaini, M., and Vignoli, V. (2018). Gas Sensing Properties of In2O3 Nano-Films Obtained by Low Temperature Pulsed Electron Deposition Technique on Alumina Substrates. Sensors, 18.
Elouali, 2012, Gas Sensing with Nano-Indium Oxides (In2O3) Prepared via Continuous Hydrothermal Flow Synthesis, Langmuir, 28, 1879, 10.1021/la203565h
Ali, 2008, NOx sensing properties of In2O3 thin films grown by MOCVD, Sens. Actuators B Chem., 129, 467, 10.1016/j.snb.2007.08.011
Williams, 1995, The influence of deposition parameters on the performance of tin dioxide NO2 sensors prepared by radio-frequency magnetron sputtering, Sens. Actuators B Chem., 25, 469, 10.1016/0925-4005(95)85100-3
Karthikeyan, 2014, The deposition of low temperature sputtered In2O3−x films using pulsed d.c magnetron sputtering from a powder target, Thin Solid Film., 550, 140, 10.1016/j.tsf.2013.10.141
Bierwagen, 2015, Indium oxide—A transparent, wide-band gap semiconductor for (opto)electronic applications, Semicond. Sci. Technol., 30, 024001, 10.1088/0268-1242/30/2/024001
Papadogianni, 2022, The electrical conductivity of cubic (In1−xGax)2O3-X films (x ≤ 0.18): Native bulk point defects, Sn-doping, and the surface electron accumulation layer, Jpn. J. Appl. Phys., 61, 045502, 10.35848/1347-4065/ac4ec7
Fort, A., Panzardi, E., Vignoli, V., Hjiri, M., Aida, M.S., Mugnaini, M., and Addabbo, T. (2019). CO3O4/Al-ZnO Nano-composites: Gas Sensing Properties. Sensors, 19.
Fort, 2006, Surface State Model for Conductance Responses During Thermal-Modulation of SnO2 Based Thick Film Sensors: Part I—Model Derivation, IEEE Trans. Instrum. Meas., 55, 2102, 10.1109/TIM.2006.887118
Fort, 2006, Surface State Model for Conductance Responses during Thermal-Modulation of SnO2 Based Thick Film Sensors: Part II—Experimental Verification, IEEE Trans. Instrum. Meas., 55, 2107, 10.1109/TIM.2006.887119
Wang, 2021, Gas sensing materials roadmap, J. Phys. Condens. Matter., 33, 303001, 10.1088/1361-648X/abf477
Barsan, 2001, Conduction model of metal oxide gas sensors, J. Electroceramics, 7, 143, 10.1023/A:1014405811371
Comini, 2006, Metal oxide nano-crystals for gas sensing, Anal. Chim. Acta, 568, 28, 10.1016/j.aca.2005.10.069
Shah, 2022, NO2 gas sensing responses of In2O3−x nanoparticles decorated on GO nanosheets, Ceram. Int., 48, 12291, 10.1016/j.ceramint.2022.01.090
Zhou, 2022, Boosting selective H2 sensing of ZnO derived from ZIF-8 by rGO functionalization, Inorg. Chem. Front., 9, 599, 10.1039/D1QI01374B
Yan, 2021, Ultrasensitive ethanol sensor based on segregated ZnO-In2O3 porous nanosheets, Appl. Surf. Sci., 535, 147697, 10.1016/j.apsusc.2020.147697
Fort, A., Panzardi, E., Al-Hamry, A., Vignoli, V., Mugnaini, M., Addabbo, T., and Kanoun, O. (2020). Highly Sensitive Detection of NO2 by Au and TiO2 Nanoparticles Decorated SWCNTs Sensors. Sensors, 20.
Addabbo, T., Bertocci, F., Fort, A., Mugnaini, M., Vignoli, V., Shahin, L., and Rocchi, S. (2013, January 6–9). Versatile measurement system for the characterization of gas sensing materials. Proceedings of the IEEE International Instrumentation and Measurement Technology Conference (I2MTC), Minneapolis, MN, USA.
Suchea, 2006, Low temperature indium oxide gas sensors, Sens. Actuators B Chem., 118, 135, 10.1016/j.snb.2006.04.020
Naseem, 1988, Effects of oxygen partial pressure on the properties of reactively evaporated thin films of indium oxide, Thin Solid Film., 156, 161, 10.1016/0040-6090(88)90291-X
Gagaoudakis, 2001, The influence of deposition parameters on room temperature ozone sensing properties of InOx films, Sens. Actuators B Chem., 80, 155, 10.1016/S0925-4005(01)00908-X
Magari, 2022, High-mobility hydrogenated polycrystalline In2O3 (In2O3:H) thin-film transistors, Nat. Commun., 13, 1078, 10.1038/s41467-022-28480-9
Fort, A., Mugnaini, M., Panzardi, E., Grasso, A.L., Al Hamry, A., Adiraju, A., Vignoli, V., and Kanoun, O. (2021). Modeling the conductivity response to NO2 gas of films based on MWCNT networks. Sensors, 21.
Wilson, R.L., Simion, C.E., Blackman, C.S., Carmalt, C.J., Stanoiu, A., Di Maggio, F., and Covington, J.A. (2018). The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition. Sensors, 18.
Sureshkumar, N., and Dutta, A. (2020). Multilayer Thin Films—Versatile Applications for Materials Engineering, IntechOpen.
Zhao, 2022, Edge-Enriched Mo2TiC2Tx/MoS2 Heterostructure with Coupling Interface for Selective NO2 Monitoring, Adv. Funct. Mater., 32, 2270220, 10.1002/adfm.202270220
Yan, 2017, Conductometric gas sensing behavior of WS2 aerogel, FlatChem, 5, 1, 10.1016/j.flatc.2017.08.003
Afzal, 2020, WS2/GeSe/WS2 Bipolar Transistor-Based Chemical Sensor with Fast Response and Recovery Times, ACS Appl. Mater. Interfaces, 12, 39524, 10.1021/acsami.0c05114
Prajapati, 2018, Ppb level detection of NO2 using a WO3 thin film based sensor: Material optimization, device fabrication and packaging, RSC Adv., 8, 6590, 10.1039/C7RA13659E
2019, The effect of different surface morphologies on WO3 and WO3-Au gas-sensors performance, J. Mater. Sci. Mater. Electron., 30, 12224, 10.1007/s10854-019-01581-w
Fomekong, R.L., and Saruhan, B. (2019). Influence of Humidity on NO2-Sensing and Selectivity of Spray-CVD Grown ZnO Thin Film above 400 °C. Chemosensor, 7.
Olaizola, 2021, Low temperature NO2 gas sensing with ZnO nanostructured by laser interference lithography, RSC Adv., 11, 34144, 10.1039/D1RA06316B
Mezher, 2020, NiO nanostructure by RF sputtering for gas sensing applications, Mater. Technol., 35, 60, 10.1080/10667857.2019.1653595
Nanda, 2021, Growth-temperature dependent unpassivated oxygen bonds determine the gas sensing abilities of chemical vapor deposition-grown CuO thin films, ACS Appl. Mater. Interfaces, 13, 21936, 10.1021/acsami.1c01085