Characterization and optimization to improve uneven surface on MEMS bridge fabrication

Displays - Tập 37 - Trang 54-61 - 2015
Y. Mafinejad1, A.Z. Kouzani1, M. Nassabi2, Y. Lim3, K. Mafinezhad4
1School of Engineering, Deakin University, Geelong, Victoria 3216, Australia
2Micro Nano Research Facility (MNRF), RMIT University, Melbourne, Victoria 3000, Australia
3Melbourne Centre for Nanofabrication, Clayton 3168, Australia
4School of Electrical and Electronic, Sadjad University of Technology, Mashad, Iran

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