Cathodic sputtering an analysis of the physical processes

Pluecker, 1858, Ueber die Einwirkung des Magneten auf die Elektrischen Entladungen in Verduennten Gasen, Pogg. Ann., 103, 88, 10.1002/andp.18581790106 Kohlschuetter, 1906, Zur Kenntnis der Kathodischen Metallzerstaeubung in Verdünnten Gasen, Z. Electrochem., 12, 869, 10.1002/bbpc.19060124802 Research Laboratories, 1923, Cathode Disintegration, Phil. Mag., 14, 98 Kingdom, 1923, The Removal of Thorium from the Surface of a Thoriated Tungsten Filament by Positive Ion Bombardment, Phys. Rev., 22, 148, 10.1103/PhysRev.22.148 Guentherschulze, 1926, Cathode Scattering. I. Electrochemical Scattering, Z. Phys., 36, 563 Blechschmidt, 1926, Cathode Scattering in Dependence on Driving Conditions, Ann. Phys., 81, 999, 10.1002/andp.19263862509 Hippel, 1926, Theory of Cathode Scattering, Ann. Phys., 81, 1043, 10.1002/andp.19263862510 Runge, 1930, Transport of Energy in the Cathode Dark Space of a Glow Discharge, Z. Phys., 61, 174, 10.1007/BF01339657 Guentherschulze, 1930, Loss of Electrons by Collisions with Positive Ions at Low Gas Pressures, Z. Phys., 62, 600 Guentherschulze, 1930, Cathode Disintegration at Very Small Gas Pressures, Z. Phys., 62, 607 Guentherschulze, 1930, Release of Electrons by the Collision of Positive Ions at Low Gas Pressures. Part II, Z. Phys., 68, 162 Meyer, 1931, Cathode Disintegration in Mercury Vapour, Z. Phys., 71, 279, 10.1007/BF01335985 Lamar, 1934, A Special Theory of Cathode Sputtering, Science, 80, 541 Seeliger, 1935, Theory of Cathode Sputtering, Z. Phys., 93, 692, 10.1007/BF01330543 Penning, 1940, Cathode Sputtering in a Magnetic Field, 43, 41 Guentherschulze, 1942, Cathodic Sputtering, Z. Phys., 119, 79 Seeliger, 1942, On the Theory of Cathode Sputtering, Z. Phys., 119, 482, 10.1007/BF01339785 Fetz, 1942, Cathodic Sputtering with Oblique Impact of the Ions, Z. Phys., 119, 590, 10.1007/BF01337787 Guentherschulze, 1942, Cathodic Sputtering in the Glow Discharge V. The Surface Properties of the Cathode, Z. Phys., 119, 685 Townes, 1944, Theory of Cathode Sputtering in Low Voltage Cathode Discharges, Phys. Rev., 65, 319, 10.1103/PhysRev.65.319 Massey, 1952 Wehner, 1954, Momentum Transfer in Sputtering by Ion Bombardment, J. Appl. Phys., 25, 270, 10.1063/1.1721621