Carbon nanotubes for interconnects in future integrated circuits: The challenge of the density

Diamond and Related Materials - Tập 19 - Trang 382-388 - 2010
Jean Dijon1, Adeline Fournier1, Pierre David Szkutnik1, Hanako Okuno1, Celine Jayet2, Murielle Fayolle2
1CEA Liten/DTNM Grenoble 17 rue des martyrs, 38054 Grenoble cedex 9, France
2CEA Leti-Minatec /D2NT Grenoble 17 rue des martyrs, 38054 Grenoble cedex 9, France

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