Lutz, 1983, Phys Lett, 5, 113, 10.1016/S0375-9601(63)91712-2
Heinen, 1964, Z Naturforschg, 19a, 1131, 10.1515/zna-1964-0920
Benninghoven, 1969, Z Angew Physik, 27, 51
Wehner, 1971, J Appl Phys, 42, 1145, 10.1063/1.1660158
Tarng, 1972, J Appl Phys, 43, 2268, 10.1063/1.1661490
Cairns, 1971, Rad Effects, 7, 167, 10.1080/00337577108230984
Maul, 1972, Phys Lett, 41A, 177, 10.1016/0375-9601(72)91101-2
Hofker, 1973, Rad Effects, 17, 83, 10.1080/00337577308232601
Schulz, 1973, Rad Effects, 18, 211, 10.1080/00337577308232124
McHugh, 1974, Rad Effects, 21, 209, 10.1080/00337577408232406
Bernheim, 1973, Int J Mass Spectrum Ion Phys, 12, 93, 10.1016/0020-7381(73)80090-7
Coburn, 1976, J Vac Sci Technol, 13, 1037, 10.1116/1.569056
Wittmaack, 1982, Rad Effects, 63, 205, 10.1080/00337578208222841
Magee, 1982, Surf Interface Anal, 4, 35, 10.1002/sia.740040202
Hofmann, 1980, Surface Interface Anal, 2, 148, 10.1002/sia.740020406
Seah, 1983, Surface Interface Anal, 5, 33, 10.1002/sia.740050108
Carter, 1982, Rad Effects, 62, 119, 10.1080/00337578208222785
Sigmund, 1969, Phys Rev, 184, 383, 10.1103/PhysRev.184.383
Sigmund, 1969, Phys Rev, 187, 768, 10.1103/PhysRev.187.768
Kinchin, 1955, Rep Progr Phys, 18, 1, 10.1088/0034-4885/18/1/301
Sigmund, 1969, Appl Phys Lett, 14, 114, 10.1063/1.1652730
Winterbon, 1970, Mat Fys Medd Dan Vid Selsk, 37, 14
Winterbon, 1972, Rad Effects, 13, 215, 10.1080/00337577208231183
Shimizu, 1977, vol II, 1417
Ishitani, 1975, Appl Phys, 6, 241, 10.1007/BF00883758
Ishitani, 1974, Phys Lett, 46A, 487, 10.1016/0375-9601(74)90977-3
Littmark, 1980, Nucl Instrum Meth, 168, 329, 10.1016/0029-554X(80)91274-4
Falcone, 1981, Appl Phys, 25, 307, 10.1007/BF00902988
Thompson, 1968, Phil Mag, 18, 377, 10.1080/14786436808227358
Carter, 1982, Vacuum, 32, 509, 10.1016/0042-207X(82)93801-5
Blank, 1979, J Appl Phys, 50, 1519, 10.1063/1.326140
Gschneider, 1964, Solid State Phys, 16, 275, 10.1016/S0081-1947(08)60518-4
Sigmund, 1969, Canad J Phys, 46, 731, 10.1139/p68-090
Andersen, 1970, Rad Effects, 3, 51, 10.1080/00337577008235616
Andersen, 1971, Rad Effects, 7, 179, 10.1080/00337577108230986
Hildebrandt, 1977, Rad Effects, 33, 251, 10.1080/00337577708233114
Molchanov, 1961, Dokl Akad Nank SSSR, 136, 801
1961, Sov Phys-Doklady, 6, 137
Shulga, 1983, Rad Effects, 70, 65, 10.1080/00337578308219206
Andersen, 1979, Appl Phys, 18, 131, 10.1007/BF00934407
Sigmund, 1980, Nucl Instrum Meth, 168, 389, 10.1016/0029-554X(80)91281-1
Schiøtt, 1972, Rad Effects, 14, 39, 10.1080/00337577208230471
Haff, 1977, J Appl Phys, 48, 3383, 10.1063/1.324179
Matterson, 1981, Appl Phys Lett, 39, 288, 10.1063/1.92675
Sigmund, 1981, Nucl Instrum Meth, 182/183, 25, 10.1016/0029-554X(81)90668-6
Matteson, 1981, Nucl Instrum Meth, 182/183, 53, 10.1016/0029-554X(81)90670-4
Paine, 1982, J Appl Phys, 53, 6828, 10.1063/1.330072
Schulz, 1976, Rad Effects, 29, 31, 10.1080/00337577608233481
Wittmaack, 1982, J Appl Phys, 53, 4817, 10.1063/1.331356
Liau, 1979, J Vac Sci Technol, 16, 121, 10.1116/1.569883
Kelly, 1976, Nucl Instrum Meth, 132, 335, 10.1016/0029-554X(76)90755-2
Sigmund, 1979, J Appl Phys, 50, 7261, 10.1063/1.325807
Sigmund, 1980, J Vac Sci Technol, 17, 396, 10.1116/1.570399
Kelly, 1980, Surface Sci, 100, 85, 10.1016/0039-6028(80)90446-X
Belz, 1980, Nucl Instrum Meth, 168, 541, 10.1016/0029-554X(80)91307-5
Taglauer, 1982, Appl Surface Sci, 13, 80, 10.1016/0378-5963(82)90018-6
Roush, 1981, Rad Effects, 55, 119, 10.1080/00337578108225473
Roush, 1981, Nucl Instrum Meth, 191, 135, 10.1016/0029-554X(81)90995-2
Betz, 1981, Nucl Instrum Meth, 182/183, 63, 10.1016/0029-554X(81)90671-6
Myers, 1980, Nucl Instrum Meth, 168, 265, 10.1016/0029-554X(80)91264-1
Sigmund, 1983, Appl Phys, A30, 43, 10.1007/BF00617712
Swartzfager, 1981, J Vac Sci Technol, 19, 185, 10.1116/1.571102
Seran, 1981, Surface Sci, 107, 176, 10.1016/0039-6028(81)90620-8
Ludeke, 1974, Appl Phys Lett, 24, 417, 10.1063/1.1655242
Hofer, 1975, Appl Phys, 8, 359, 10.1007/BF00898370
Hofmann, 1977, Thin Solid Films, 43, 275, 10.1016/0040-6090(77)90289-9
Hofer, 1978, Appl Phys, 16, 271, 10.1007/BF00885122
Hofmann, 1979, Thin Solid Films, 60, 201, 10.1016/0040-6090(79)90190-1
Naundorf, 1980, Nucl Instrum Meth, 168, 405, 10.1016/0029-554X(80)91284-7
Wittmaack, 1978, Thin Solid Films, 52, 259, 10.1016/0040-6090(78)90144-X
Werner, 1982, Surface Interface Anal, 4, 1, 10.1002/sia.740040102
Hofmann, 1976, Appl Phys, 9, 59, 10.1007/BF00901910
Hofmann, 1977, Appl Phys, 13, 205, 10.1007/BF00882481
Shimizu, 1979, Appl Phys, 18, 425, 10.1007/BF00899698
Erlewein, 1980, Thin Solid Films, 69, L39, 10.1016/0040-6090(80)90202-3
Blattner, 1979, Surface Interface Anal, 1, 32, 10.1002/sia.740010107
Tsunoyama, 1980, Surface Interface Anal, 2, 212, 10.1002/sia.740020605
Ishitani, 1975, Appl Phys, 6, 277, 10.1007/BF00883764
Wittmaack, 1977, Surface Sci, 68, 118, 10.1016/0039-6028(77)90196-0
Bispinck, 1979, Appl Phys, 18, 113, 10.1007/BF00934404
Stumpe, 1979, Appl Phys, 20, 55, 10.1007/BF00901787
Magee, 1980, Nucl Instrum Meth, 168, 383, 10.1016/0029-554X(80)91280-X
Wittmaack, 1979, Surface Sci, 89, 668, 10.1016/0039-6028(79)90648-4
Benninghoven, 1975, Thin Solid Films, 28, 59, 10.1016/0040-6090(75)90275-8
Williams, 1978, Surface Sci, 78, 324, 10.1016/0039-6028(78)90084-5
Wittmaack, 1981, Surface Sci, 112, 168, 10.1016/0039-6028(81)90340-X
Johannesen, 1976, J Appl Phys, 47, 3028, 10.1063/1.323047
Helms, 1979, J Appl Phys, 50, 7007, 10.1063/1.325858
Schwarz, 1979, J Vac Sci Technol, 16, 781, 10.1116/1.570085
Etzkorn, 1980, Nucl Instrum Meth, 168, 395, 10.1016/0029-554X(80)91282-3
Taglauer, 1978, Appl Phys Lett, 33, 950, 10.1063/1.90230
Andelsen, 1974, Mat Fys Medd Dan Vid Selsk, 39, 10
Gras-Marti, 1981, Nucl Instrum Meth, 180, 211, 10.1016/0029-554X(81)90032-X
Liau, 1978, J Appl Phys, 49, 5295, 10.1063/1.324431
Wittmaack, 1981, Nucl Instrum Meth, 191, 327, 10.1016/0029-554X(81)91024-7
Wach, 1982, Surface Interface Anal, 4, 203, 10.1002/sia.740040603
Wach, 1982, Nucl Instrum Meth, 194, 113, 10.1016/0029-554X(82)90499-2
Wach, 1983, Phys Rev B, 27, 3528, 10.1103/PhysRevB.27.3528
Clegg, 1981, Appl Phys Lett, 39, 997, 10.1063/1.92640
Winterbon, 1972, Rad Effects, 15, 73, 10.1080/00337577208232583
Katz, 1980, Surface Interface Anal, 2, 120, 10.1002/sia.740020308
Wittmaack, 1977, Appl Phys, 12, 149, 10.1007/BF00896140
Blank, 1979, Rad Effects Lett, 43, 105, 10.1080/01422447908226479
Wittmaack, 1983, Nucl Instrum Meth, 209/210, 191, 10.1016/0167-5087(83)90799-8
K Wittmaack, unpublished results.
H Harms and K Kempter, Siemens AG, private communication.
Williams, 1981, Nucl Instrum Meth, 182/183, 15, 10.1016/0029-554X(81)90667-4
Williams, 1981, Nucl Instrum Meth, 191, 318, 10.1016/0029-554X(81)91022-3
Reuter, 1980, Appl Surface Sci, 5, 221, 10.1016/0378-5963(80)90063-X
Matteson, 1981, Appl Surface Sci, 9, 335, 10.1016/0378-5963(81)90046-5
Williams, 1978, Appl Phys Lett, 39, 758
JB Clegg, private communication.
