Balance-approach for load–displacement measurement of microstructures

Mechatronics - Tập 8 - Trang 549-559 - 1998
Xingguo Xiong1, Qiang Zou1, Deren Lu1, Weiyuan Wang1
1State Key Laboratory of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, P.R. China

Tài liệu tham khảo

Pharr, 1992, Measurement of thin film mechanical properties using nanoindentation. MRS Bulletin, 7, 28 Zou, 1995, Study of techniques for measuring residual stress in micromachined films. Chinese Journal of Semiconductors, 7, 509 Lu, 1994, Chinese Practical Novel Patent Bulletin. Patent No. ZL, 4, 180 Xu Benan, Li Xiuzhi. Material Mechanics. Shanghai : Shanghai JiaoTong University Press, 1988, pp. 225–30. Suzuki, 1990, Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique. Sensors and Actuators, 23, 316 Rudolf, 1990, Precision accelerometers with μg resolution. Sensors and Actuators, 23, 297, 10.1016/0924-4247(90)85059-D Seidel, 1990, Capacitive silicon accelerometer with highly symmetrical design. Sensors and Actuators, 23, 312 Greenwood JC. Silicon as a mechanical material, fabrication techniques. Silicon Based Sensors. IOP Short Meetings, No. 3. London : Institute of Physics, 1986, pp. 1–13. Qu Xixin. Electronic Component Material Handbook. Peking : Electronic Industrial Press, 1989, p. 352. Zou, 1997, Structure design and fabrication of symmetric capacitive force–balance micromachining silicon accelerometer. Proceedings of SPIE, 3223, 284