B doping effect on gas source Si-MBE growth: a comparison of B2H6 gas doping and HBO2 Knudsen cell doping

Ohta, 1983, Thin Solid Films, 106, 3 Bean, 1987, J. Crystal Growth, 81, 411, 10.1016/0022-0248(87)90426-X Tatsumi, 1988, Appl. Phys. Letters, 52, 895, 10.1063/1.99265 Hirayama, 1987, Appl. Phys. Letters, 51, 2213, 10.1063/1.99009 Hirayama, 1988, Appl. Phys. Letters, 52, 1484, 10.1063/1.99106 Hirayama, 1989, J. Crystal Growth, 95, 476, 10.1016/0022-0248(89)90446-6 H. Hirayama, M. Hiroi and K. Koyama, unpublished. Hirayama, 1989, J. Appl. Phys., 66, 629, 10.1063/1.343529 Hirayama, 1989, Appl. Phys. Letters, 54, 156, 10.1063/1.101214 M. Hiroi, K. Koyama, T. Tatsumi and H. Hirayama, unpublished. H. Hirayama, M. Hiroi, K. Koyama and T. Tatsumi, Appl. Phys. Letters, in press. Bozso, 1988, Phys. Rev., B38, 3943, 10.1103/PhysRevB.38.3943 Suda, 1990, J. Vacuum Sci. Technol., A8, 61, 10.1116/1.576356 H. Hirayama, K. Koyama, M. Hiroi and T. Tatsumi, in: Proc. Mater. Res. Soc. 1990 Spring Meeting, to be published. Hirayama, 1988, Surface Sci., 193, L47, 10.1016/0039-6028(88)90316-0 Kaxiras, 1990, Phys. Rev., B41, 1262, 10.1103/PhysRevB.41.1262