Automated phase-measuring profilometry using defocused projection of a Ronchi grating

Optics Communications - Tập 94 Số 6 - Trang 561-573 - 1992
Xianyu Su1, Wensen Zhou1, Gert von Bally2, Dalibor Vukičević2
1Opto-Electronics Department, Sichuan University, Chengdu 610064, China
2Laboratory of Biophysics, Institute of Experimental Audiology, Münster University, Kardinal-von-Galen-Ring 10, W-4400 Münster, Germany

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Tài liệu tham khảo

Takasaki, 1970, Appl. Optics, 9, 1467, 10.1364/AO.9.001467

Srinivasan, 1984, Appl. Optics, 23, 3105, 10.1364/AO.23.003105

Srinivasan, 1985, Appl. Optics, 24, 185, 10.1364/AO.24.000185

Takeda, 1983, Appl. Optics, 22, 3977, 10.1364/AO.22.003977

Su, 1988, Proc. SPIE., 954, 32

Li, 1990, Opt. Eng., 29, 1439, 10.1117/12.55689

Toyooka, 1986, Appl. Optics, 25, 1630, 10.1364/AO.25.001630

Harding, 1984, Appl. Optics, 23, 1517, 10.1364/AO.23.001517

Chen, 1989, Chinese Journal of Scientific Instruments, 10, 409