Automated phase-measuring profilometry using defocused projection of a Ronchi grating
Tóm tắt
Từ khóa
Tài liệu tham khảo
Su, 1988, Proc. SPIE., 954, 32
Chen, 1989, Chinese Journal of Scientific Instruments, 10, 409
Su, 1988, Proc. SPIE., 954, 32
Chen, 1989, Chinese Journal of Scientific Instruments, 10, 409