Applications of remote epitaxy and van der Waals epitaxy
Tóm tắt
Epitaxy technology produces high-quality material building blocks that underpin various fields of applications. However, fundamental limitations exist for conventional epitaxy, such as the lattice matching constraints that have greatly narrowed down the choices of available epitaxial material combinations. Recent emerging epitaxy techniques such as remote and van der Waals epitaxy have shown exciting perspectives to overcome these limitations and provide freestanding nanomembranes for massive novel applications. Here, we review the mechanism and fundamentals for van der Waals and remote epitaxy to produce freestanding nanomembranes. Key benefits that are exclusive to these two growth strategies are comprehensively summarized. A number of original applications have also been discussed, highlighting the advantages of these freestanding films-based designs. Finally, we discuss the current limitations with possible solutions and potential future directions towards nanomembranes-based advanced heterogeneous integration.
Tài liệu tham khảo
J. Tournet, Y. Lee, S.K. Karuturi, H.H. Tan, C. Jagadish, ACS Energy Lett. 5, 611–622 (2020)
J. Li, A. Aierken, Y. Liu, Y. Zhuang, X. Yang, J. Mo, R. Fan, Q. Chen, S. Zhang, Y. Huang, Front. Phys. 8, 631925 (2021)
J. Yoon, S.M. Lee, D. Kang, M.A. Meitl, C.A. Bower, J.A. Rogers, Advanced. Opt. Mater. 3, 1313–1335 (2015)
A. Carlson, A.M. Bowen, Y. Huang, R.G. Nuzzo, J.A. Rogers, Adv. Mater. 24, 5284–5318 (2012)
D. van der Woude, M. van Eerden, P, Mulder, G.J. Bauhuis, E. Vlieg, J.J. Schermer. Epitaxial lift-off of ultra-thin GaAs solar cells with textured back contact layer and diffuse silver mirror. in 2020 47th IEEE photovoltaic specialists conference (PVSC), (IEEE, 2020). https://ieeexplore.ieee.org/abstract/document/9300588
J. Chun, Y. Hwang, Y.-S. Choi, J.-J. Kim, T. Jeong, J.H. Baek, H.C. Ko, S.-J. Park, Scripta Mater. 77, 13–16 (2014)
J. Shin, H. Kim, S. Sundaram, J. Jeong, B.-I. Park, C.S. Chang, J. Choi, T. Kim, M. Saravanapavanantham, K. Lu, S. Kim, J.M. Suh, K.S. Kim, M.-K. Song, Y. Liu, K. Qiao, J.H. Kim, Y. Kim, J.-H. Kang, J. Kim, D. Lee, J. Lee, J.S. Kim, H.E. Lee, H. Yeon, H.S. Kum, S.-H. Bae, V. Bulovic, K.J. Yu, K. Lee, K. Chung, Y.J. Hong, A. Ougazzaden, J. Kim, Nature 614, 81–87 (2023)
H. Kim, C.S. Chang, S. Lee, J. Jiang, J. Jeong, M. Park, Y. Meng, J. Ji, Y. Kwon, X. Sun, Nat. Rev. Methods Primers 2, 1–21 (2022)
W. Kong, H. Kum, S.-H. Bae, J. Shim, H. Kim, L. Kong, Y. Meng, K. Wang, C. Kim, J. Kim, Nat. Nanotechnol. 14, 927–938 (2019)
K.S. Kim, D. Lee, C.S. Chang, S. Seo, Y. Hu, H. Kim, J. Shin, J.-H. Lee, S. Lee, J.S. Kim, K.H. Kim, J.M. Suh, Y. Meng, B.-I. Park, H.S. Kum, G.Y. Yeom, K. Cho, J.-H. Park, S.-H. Bae, J. Kim, Nature. 11, 1142 (2023)
H. Kim, J.C. Kim, Y. Jeong, J. Yu, K. Lu, D. Lee, N. Kim, H.Y. Jeong, J. Kim, S. Kim, J. Appl. Phys. 130, 174901 (2021)
W. Kong, H. Li, K. Qiao, Y. Kim, K. Lee, Y. Nie, D. Lee, T. Osadchy, R.J. Molnar, D.K. Gaskill, R.L. Myers-Ward, K.M. Daniels, Y. Zhang, S. Sundram, Y. Yu, S.-H. Bae, S. Rajan, Y. Shao-Horn, K. Cho, A. Ougazzaden, J.C. Grossman, J. Kim, Nat. Mater. 17, 999–1004 (2018)
A. Koma, K. Sunouchi, T. Miyajima, J. Vacuum Sci. Technol. B Microelectron. Process. Phenom. 3, 724–724 (1985)
J. Kim, C. Bayram, H. Park, C.-W. Cheng, C. Dimitrakopoulos, J.A. Ott, K.B. Reuter, S.W. Bedell, D.K. Sadana, Nat. Commun. 5, 4836 (2014)
M. Hiroki, K. Kumakura, Y. Kobayashi, T. Akasaka, T. Makimoto, H. Yamamoto, Appl. Phys. Lett. 105, 193509 (2014)
H. Yoo, K. Chung, Y.S. Choi, C.S. Kang, K.H. Oh, M. Kim, G.-C. Yi, Adv. Mater. 24, 515–518 (2012)
P. Gupta, A.A. Rahman, N. Hatui, M.R. Gokhale, M.M. Deshmukh, A. Bhattacharya, J. Cryst. Growth 372, 105–108 (2013)
P. Gupta, A.A. Rahman, N. Hatui, J.B. Parmar, B.A. Chalke, R.D. Bapat, S.C. Purandare, M.M. Deshmukh, A. Bhattacharya, Appl. Phys. Lett. 103, 181108 (2013)
T.H. Seo, A.H. Park, S. Park, Y.H. Kim, G.H. Lee, M.J. Kim, M.S. Jeong, Y.H. Lee, Y.-B. Hahn, E.-K. Suh, Sci. Rep. 5, 7747 (2015)
S.J. Chae, Y.H. Kim, T.H. Seo, D.L. Duong, S.M. Lee, M.H. Park, E.S. Kim, J.J. Bae, S.Y. Lee, H. Jeong, RSC Adv. 5, 1343–1349 (2015)
M. Heilmann, G. Sarau, M. Göbelt, M. Latzel, S. Sadhujan, C. Tessarek, S. Christiansen, Cryst. Growth Des. 15, 2079–2086 (2015)
C.-H. Ma, J.-C. Lin, H.-J. Liu, T.H. Do, Y.-M. Zhu, T.D. Ha, Q. Zhan, J.-Y. Juang, Q. He, E. Arenholz, P.-W. Chiu, Y.-H. Chu, Appl. Phys. Lett. 108, 253104 (2016)
J. Xiao, J. Liu, K. Sun, Y. Zhao, Z. Shao, X. Liu, Y. Yuan, Y. Li, H. Xie, F. Song, Y. Gao, H. Huang, J. Phys. Chem. Lett. 10, 4203–4208 (2019)
S. Ke, J. Xie, C. Chen, P. Lin, X. Zeng, L. Shu, L. Fei, Y. Wang, M. Ye, D. Wang, Appl. Phys. Lett. 112, 031905 (2018)
H. Yoon, T. Truttmann, F. Liu, Q. Su, V. Saraswat, S. Manzo, S. Koester, M. Arnold, J. Kawasaki, B. Jalan, Bull. Am. Phys. Soc. 11, 1142 (2022)
I. Hilmi, A. Lotnyk, J.W. Gerlach, P. Schumacher, B. Rauschenbach, APL Mater. 5, 050701 (2017)
Y. Xu, B. Cao, Z. Li, D. Cai, Y. Zhang, G. Ren, J. Wang, L. Shi, C. Wang, K. Xu, ACS Appl. Mater. Interfaces 9, 44001–44009 (2017)
M.T. Dau, C. Vergnaud, M. Gay, C.J. Alvarez, A. Marty, C. Beigné, D. Jalabert, J.F. Jacquot, O. Renault, H. Okuno, M. Jamet, APL Mater. 7, 051111 (2019)
Y. Chen, H. Zang, S. Zhang, Z. Shi, J. Ben, K. Jiang, Y. Jia, M. Liu, D. Li, X. Sun, ACS Appl. Mater. Interfaces 14, 37947–37957 (2022)
H. Chang, Z. Chen, W. Li, J. Yan, R. Hou, S. Yang, Z. Liu, G. Yuan, J. Wang, J. Li, P. Gao, T. Wei, Appl. Phys. Lett. 114, 091107 (2019)
C. Jia, X. Zhao, Y.-H. Lai, J. Zhao, P.-C. Wang, D.-S. Liou, P. Wang, Z. Liu, W. Zhang, W. Chen, Y.-H. Chu, J. Li, Nano Energy 60, 476–484 (2019)
T. Yang, B. Zheng, Z. Wang, T. Xu, C. Pan, J. Zou, X. Zhang, Z. Qi, H. Liu, Y. Feng, W. Hu, F. Miao, L. Sun, X. Duan, A. Pan, Nat. Commun. 8, 1906 (2017)
X. Li, M.-W. Lin, J. Lin, B. Huang, A.A. Puretzky, C. Ma, K. Wang, W. Zhou, S.T. Pantelides, M. Chi, I. Kravchenko, J. Fowlkes, C.M. Rouleau, D.B. Geohegan, K. Xiao, Sci. Adv. 2, e150 (1882)
C. Liu, J. Guo, L. Yu, J. Li, M. Zhang, H. Li, Y. Shi, D. Dai, Light Sci. Appl. 10, 1–21 (2021)
Y. Jia, J. Ning, J. Zhang, B. Wang, C. Yan, Y. Zeng, H. Wu, Y. Zhang, X. Shen, C. Zhang, H. Guo, D. Wang, Y. Hao, ACS Appl. Mater. Interfaces. 13, 32442–32449 (2021)
C.-I. Li, J.-C. Lin, H.-J. Liu, M.-W. Chu, H.-W. Chen, C.-H. Ma, C.-Y. Tsai, H.-W. Huang, H.-J. Lin, H.-L. Liu, P.-W. Chiu, Y.-H. Chu, Chem. Mater. 28, 3914–3919 (2016)
P.-C. Wu, P.-F. Chen, T.H. Do, Y.-H. Hsieh, C.-H. Ma, T.D. Ha, K.-H. Wu, Y.-J. Wang, H.-B. Li, Y.-C. Chen, J.-Y. Juang, P. Yu, L.M. Eng, C.-F. Chang, P.-W. Chiu, L.H. Tjeng, Y.-H. Chu, ACS Appl. Mater. Interfaces. 8, 33794–33801 (2016)
T. Amrillah, Y. Bitla, K. Shin, T. Yang, Y.-H. Hsieh, Y.-Y. Chiou, H.-J. Liu, T.H. Do, D. Su, Y.-C. Chen, S.-U. Jen, L.-Q. Chen, K.H. Kim, J.-Y. Juang, Y.-H. Chu, ACS Nano 11, 6122–6130 (2017)
J. Jiang, Y. Bitla, C.-W. Huang, T.H. Do, H.-J. Liu, Y.-H. Hsieh, C.-H. Ma, C.-Y. Jang, Y.-H. Lai, P.-W. Chiu, W.-W. Wu, Y.-C. Chen, Y.-C. Zhou, Y.-H. Chu, Sci. Adv. 3, 1700121 (2017)
Y. Bitla, C. Chen, H.-C. Lee, T.H. Do, C.-H. Ma, L.V. Qui, C.-W. Huang, W.-W. Wu, L. Chang, P.-W. Chiu, Y.-H. Chu, ACS Appl. Mater. Interfaces. 8, 32401–32407 (2016)
H.-J. Liu, C.-K. Wang, D. Su, T. Amrillah, Y.-H. Hsieh, K.-H. Wu, Y.-C. Chen, J.-Y. Juang, L.M. Eng, S.-U. Jen, Y.-H. Chu, ACS Appl. Mater. Interfaces. 9, 7297–7304 (2017)
Y. Kim, S.S. Cruz, K. Lee, B.O. Alawode, C. Choi, Y. Song, J.M. Johnson, C. Heidelberger, W. Kong, S. Choi, K. Qiao, I. Almansouri, E.A. Fitzgerald, J. Kong, A.M. Kolpak, J. Hwang, J. Kim, Nature 544, 340–343 (2017)
J. Jeong, D.K. Jin, J. Choi, J. Jang, B.K. Kang, Q. Wang, W.I. Park, M.S. Jeong, B.-S. Bae, W.S. Yang, M.J. Kim, Y.J. Hong, Nano Energy 86, 106075 (2021)
J. Jeong, K.-A. Min, B.K. Kang, D.H. Shin, J. Yoo, W.S. Yang, S.W. Lee, S. Hong, Y.J. Hong, Appl. Phys. Lett. 113, 233103 (2018)
P. Bandaru, E. Yablonovitch, J. Electrochem. Soc. 149, G599 (2002)
J.J. Schermer, P. Mulder, G.J. Bauhuis, M.M.A.J. Voncken, J. van Deelen, E. Haverkamp, P.K. Larsen, Phys. Status Solidi 202, 501–508 (2005)
K.-T. Shiu, J. Zimmerman, H. Wang, S.R. Forrest, Appl. Phys. Lett. 95, 223503 (2009)
S. Moon, K. Kim, Y. Kim, J. Heo, J. Lee, Sci. Rep. 6, 30107 (2016)
M. Englhard, C. Klemp, M. Behringer, A. Rudolph, O. Skibitzki, P. Zaumseil, T. Schroeder, J. Appl. Phys. 120, 045301 (2016)
I. Polentier, L. Buydens, A. Ackaert, P. Demeester, P. Van Daele, F. Depestel, D. Lootens, R. Baets, Electron. Lett. 13, 925–927 (1990)
J. Yoon, S. Jo, I.S. Chun, I. Jung, H.-S. Kim, M. Meitl, E. Menard, X. Li, J.J. Coleman, U. Paik, J.A. Rogers, Nature 465, 329–333 (2010)
W.S. Wong, T. Sands, N.W. Cheung, Appl. Phys. Lett. 72, 599–601 (1998)
C.M. Gerhard, Stappenbeck impact of the polishing suspension concentration on laser damage of classically manufactured and plasma post-processed zinc crown glass surfaces. Appl. Sci. (2018). https://doi.org/10.3390/app8091556
C.R. Giuliano, Appl. Phys. Lett. 21, 39–41 (1972)
S.W. Bedell, P. Lauro, J.A. Ott, K. Fogel, D.K. Sadana, J. Appl. Phys. 122, 025103 (2017)
S.W. Bedell, C. Bayram, K. Fogel, P. Lauro, J. Kiser, J. Ott, Y. Zhu, D. Sadana, Appl. Phys. Express 6, 112301 (2013)
C.A. Sweet, K.L. Schulte, J.D. Simon, M.A. Steiner, N. Jain, D.L. Young, A.J. Ptak, C.E. Packard, Appl. Phys. Lett. 108, 011906 (2016)
D. Shahrjerdi, S.W. Bedell, C. Bayram, C.C. Lubguban, K. Fogel, P. Lauro, J.A. Ott, M. Hopstaken, M. Gayness, D. Sadana, Adv. Energy Mater. 3, 566–571 (2013)
E.U. Onyegam, D. Sarkar, M. Hilali, S. Saha, R.A. Rao, L. Mathew, D. Jawarani, J. Mantey, M. Ainom, R. Garcia, W. James, S.K. Banerjee, Sol. Energy Mater. Sol. Cells 111, 206–211 (2013)
S.W. Bedell, D. Shahrjerdi, B. Hekmatshoar, K. Fogel, P.A. Lauro, J.A. Ott, N. Sosa, D. Sadana, IEEE J. Photovolt. 2, 141–147 (2012)
D. Shahrjerdi, S.W. Bedell, Nano Lett. 13, 315–320 (2013)
Y. Zhai, L. Mathew, R. Rao, D. Xu, S.K. Banerjee, Nano Lett. 12, 5609–5615 (2012)
Y. Kwon, C. Yang, S.-H. Yoon, H.-D. Um, J.-H. Lee, B. Yoo, Appl. Phys. Express 6, 116502 (2013)
H. Kum, D. Lee, W. Kong, H. Kim, Y. Park, Y. Kim, Y. Baek, S.-H. Bae, K. Lee, J. Kim, Nature Electronics. 2, 439–450 (2019)
Y. Kim, S.S. Cruz, K. Lee, B.O. Alawode, C. Choi, Y. Song, J.M. Johnson, C. Heidelberger, W. Kong, S.J.N. Choi, Nature 544, 340–343 (2017)
J.A. Rogers, M.G. Lagally, R.G. Nuzzo, Nature 477, 45–53 (2011)
K. Qiao, Y. Liu, C. Kim, R.J. Molnar, T. Osadchy, W. Li, X. Sun, H. Li, R.L. Myers-Ward, D. Lee, S. Subramanian, H. Kim, K. Lu, J.A. Robinson, W. Kong, J. Kim, Nano Lett. 21, 4013–4020 (2021)
H. Kim, Y. Liu, K. Lu, C.S. Chang, K. Qiao, K.S. Kim, B.-I. Park, J. Jeong, M. Zhu, J.M. Suh, arXiv preprint 11, 08002 (2022)
N. Han, T. Viet Cuong, M. Han, B. Deul Ryu, S. Chandramohan, J. Bae Park, J. Hye Kang, Y-J. Park, K. Bok Ko, H. Yun Kim, H. Kyu Kim, J. Hyoung Ryu, Y.S. Katharria, C-J. Choi, and C-H. Hong. Nat Commun. 4, 1452 (2013). https://doi.org/10.1038/ncomms2448
K. Chung, C.-H. Lee, G.-C.J.S. Yi, Science 330, 655–657 (2010)
S. Fernández-Garrido, M. Ramsteiner, G. Gao, L.A. Galves, B. Sharma, P. Corfdir, G. Calabrese, Z. de Souza Schiaber, C. Pfüller, A. Trampert, J.M.J. Lopes, O. Brandt, and L. Geelhaar. Nano Lett. 17, 5213–5221 (2017). https://doi.org/10.1021/acs.nanolett.7b01196
Z. Chen, Z. Liu, T. Wei, S. Yang, Z. Dou, Y. Wang, H. Ci, H. Chang, Y. Qi, J. Yan, J. Wang, Y. Zhang, P. Gao, J. Li, Z. Liu, Adv. Mater. 31, 1807345 (2019)
S.-H. Bae, K. Lu, Y. Han, S. Kim, K. Qiao, C. Choi, Y. Nie, H. Kim, H.S. Kum, P. Chen, W. Kong, B.-S. Kang, C. Kim, J. Lee, Y. Baek, J. Shim, J. Park, M. Joo, D.A. Muller, K. Lee, J. Kim, Nat. Nanotechnol. 15, 272–276 (2020)
Y. Kim, J.M. Suh, J. Shin, Y. Liu, H. Yeon, K. Qiao, H.S. Kum, C. Kim, H.E. Lee, C. Choi, H. Kim, D. Lee, J. Lee, J.-H. Kang, B.-I. Park, S. Kang, J. Kim, S. Kim, J.A. Perozek, K. Wang, Y. Park, K. Kishen, L. Kong, T. Palacios, J. Park, M.-C. Park, H.-J. Kim, Y.S. Lee, K. Lee, S.-H. Bae, W. Kong, J. Han, J. Kim, Science 377, 859–864 (2022)
H.S. Kum, H. Lee, S. Kim, S. Lindemann, W. Kong, K. Qiao, P. Chen, J. Irwin, J.H. Lee, S. Xie, S. Subramanian, J. Shim, S.-H. Bae, C. Choi, L. Ranno, S. Seo, S. Lee, J. Bauer, H. Li, K. Lee, J.A. Robinson, C.A. Ross, D.G. Schlom, M.S. Rzchowski, C.-B. Eom, J. Kim, Nature 578, 75–81 (2020)
K.S. Kim, J.E. Kang, P. Chen, S. Kim, J. Ji, G.Y. Yeom, J. Kim, H.S. Kum, APL Mater. 10, 041105 (2022)
L. Dai, J. Zhao, J. Li, B. Chen, S. Zhai, Z. Xue, Z. Di, B. Feng, Y. Sun, Y. Luo, M. Ma, J. Zhang, S. Ding, L. Zhao, Z. Jiang, W. Luo, Y. Quan, J. Schwarzkopf, T. Schroeder, Z.-G. Ye, Y.-H. Xie, W. Ren, G. Niu, Nat. Commun. 13, 2990 (2022)
F. Eltes, C. Mai, D. Caimi, M. Kroh, Y. Popoff, G. Winzer, D. Petousi, S. Lischke, J.E. Ortmann, L. Czornomaz, L. Zimmermann, J. Fompeyrine, S. Abel, J. Lightwave Technol. 37, 1456–1462 (2019)
F. Eltes, G.E. Villarreal-Garcia, D. Caimi, H. Siegwart, A.A. Gentile, A. Hart, P. Stark, G.D. Marshall, M.G. Thompson, J. Barreto, J. Fompeyrine, S. Abel, Nat. Mater. 19, 1164–1168 (2020)
Y. Jia, J. Ning, J. Zhang, C. Yan, B. Wang, Y. Zhang, J. Zhu, X. Shen, J. Dong, D. Wang, Y. Hao, Adv. Opt. Mater. 8, 1901632 (2020)
Y. Lu, S. Krishna, C.-H. Liao, Z. Yang, M. Kumar, Z. Liu, X. Tang, N. Xiao, M.B. Hassine, S.T. Thoroddsen, X. Li, ACS Appl. Mater. Interfaces 14, 47922–47930 (2022)
C.-H. Yeh, Z.-Y. Liang, Y.-C. Lin, T.-L. Wu, T. Fan, Y.-C. Chu, C.-H. Ma, Y.-C. Liu, Y.-H. Chu, K. Suenaga, P.-W. Chiu, ACS Appl. Mater. Interfaces. 9, 36181–36188 (2017)
K. Lee, D. Yoo, H. Oh, G.-C. Yi, Sci. Rep. 10, 19677 (2020)
J. Meier, G., Bacher progress and challenges of InGaN/GaN-based core–shell microrod LEDs. Materials (2022). https://doi.org/10.3390/ma15051626
K. Chung, H. Yoo, J.K. Hyun, H. Oh, Y. Tchoe, K. Lee, H. Baek, M. Kim, G.-C. Yi, Adv. Mater. 28, 7688–7694 (2016)
C.-H. Lee, Y.-J. Kim, Y.J. Hong, S.-R. Jeon, S. Bae, B.H. Hong, G.-C. Yi, Adv. Mater. 23, 4614–4619 (2011)
H. Luo, X. Xia, G.D. Kim, Y. Liu, Z. Xue, L. Zhang, Y. Shu, T. Yang, Y. Chen, S. Zhang, H. Chen, W. Zhang, R. Li, H. Tang, B. Dong, X. Fu, W. Cheng, W. Zhang, L. Yang, Y. Peng, L. Dai, H. Hu, Y. Jiang, C. Gong, Y. Hu, J. Zhu, Z. Li, C. Caulin, T. Wei, J. Park, H. Xu, Sci. Adv. 7, 3657 (2021)
W.V. Lundin, E.E. Zavarin, A.V. Sakharov, D.A. Zakheim, V.Y. Davydov, A.N. Smirnov, I.A. Eliseyev, M.A. Yagovkina, P.N. Brunkov, E.Y. Lundina, L.K. Markov, A.F. Tsatsulnikov, J. Cryst. Growth 504, 1–6 (2018)
Y. Meng, Y. Chen, L. Lu, Y. Ding, A. Cusano, J.A. Fan, Q. Hu, K. Wang, Z. Xie, Z. Liu, Y. Yang, Q. Liu, M. Gong, Q. Xiao, S. Sun, M. Zhang, X. Yuan, X. Ni, Light Sci. Appl. 10, 235 (2021)
H. Kim, S. Lee, J. Shin, M. Zhu, M. Akl, K. Lu, N.M. Han, Y. Baek, C.S. Chang, J.M. Suh, K.S. Kim, B.-I. Park, Y. Zhang, C. Choi, H. Shin, H. Yu, Y. Meng, S.-I. Kim, S. Seo, K. Lee, H.S. Kum, J.-H. Lee, J.-H. Ahn, S.-H. Bae, J. Hwang, Y. Shi, J. Kim, Nat. Nanotechnol. 17, 1054–1059 (2022)
Q. Wu, Y. Guo, S. Sundaram, J. Yan, L. Zhang, T. Wei, X. Wei, J. Wang, A. Ougazzaden, J. Li, Appl. Phys. Express 12, 015505 (2019)
Y. Meng, J. Feng, S. Han, Z. Xu, W. Mao, T. Zhang, J. Kim, I. Roh, Y. Zhao, D-H. Kim, Y. Yang, J-W. Lee, L. Yang, C-W. Qiu, S-H. Bae. Nat. Rev. Mater. (2023). https://doi.org/10.1038/s41578-023-00558-w
S. Han, Y. Meng, Z. Xu, J.S. Kim, Y. Li, I.-P. Roh, H. Ahn, D.-H. Kim, S.-H. Bae, ACS Appl. Mater. Electron. (2023). https://doi.org/10.1021/acsaelm.2c01411
Y. Meng, S. Ye, Y. Shen, Q. Xiao, X. Fu, R. Lu, Y. Liu, M. Gong, IEEE Photonics J. 10, 6600217 (2018)
X. Wang, P. Xie, B. Chen, X. Zhang, Nano Micro Lett. 14, 221 (2022)
Y. Meng, F. Hu, Y. Shen, Y. Yang, Q. Xiao, X. Fu, M. Gong, Sci. Rep. 8, 13362 (2018)
J. Wang, S. Xia, R. Wang, R. Ma, Y. Lu, X. Zhang, D. Song, Q. Wu, R. Morandotti, J. Xu, Z. Chen, Light Sci. Appl. 11, 152 (2020)
H. Lin, Z. Zhang, H. Zhang, K.-T. Lin, X. Wen, Y. Liang, Y. Fu, A.K.T. Lau, T. Ma, C.-W. Qiu, Chem. Rev. 122, 15204–15355 (2022)
R. Wang, L. Xu, J. Wang, L. Sun, Y. Jiao, Y. Meng, S. Chen, C. Chang, C. Fan, Nanoscale 13, 18467–18472 (2021)
Y. Meng, R. Lu, Y. Shen, Y. Liu, M. Gong, Optics Commun. 405, 73–79 (2017)
J. Jeong, Q. Wang, J. Cha, D.K. Jin, D.H. Shin, S. Kwon, B.K. Kang, J.H. Jang, W.S. Yang, Y.S. Choi, J. Yoo, J.K. Kim, C.-H. Lee, S.W. Lee, A. Zakhidov, S. Hong, M.J. Kim, Y.J. Hong, Sci. Adv. 6, 5180 (2020)
J. Jiang, X. Sun, X. Chen, B. Wang, Z. Chen, Y. Hu, Y. Guo, L. Zhang, Y. Ma, L. Gao, F. Zheng, L. Jin, M. Chen, Z. Ma, Y. Zhou, N.P. Padture, K. Beach, H. Terrones, Y. Shi, D. Gall, T.-M. Lu, E. Wertz, J. Feng, J. Shi, Nat. Commun. 10, 4145 (2019)
N. Chen, Y. Hu, X. Liu, J. Yang, W. Li, D. Lu, J. Fu, Y. Liang, W. Wang, J. Phys. Chem. C 124, 21968–21977 (2020)
Y-C. Liang, C-H. Huang. Nanotechnology Reviews 11, 1248–1262 (2022). https://doi.org/10.1515/ntrev-2022-0076
S. Kim, P. Anushkkaran, W.-S. Chae, S.H. Choi, M. Kumar, M. Cho, M.A. Mahadik, H.H. Lee, J.S. Jang, ACS Appl. Energy Mater. 5, 915–929 (2022)
R. Wang, S. Chen, Y.H. Ng, Q. Gao, S. Yang, S. Zhang, F. Peng, Y. Fang, S. Zhang, Chem. Eng. J. 362, 658–666 (2019)
S.S. Patil, M.A. Johar, M.A. Hassan, A. Waseem, I.V. Bagal, D.E. Shinde, S.-W. Ryu, Mater. Chem. Phys. 260, 124141 (2021)
G. Rekhila, Y. Azoudj, K. Cherifi, S. Hamel, M. Benbouzid, Y. Bessekhouad, M. Trari, Chem. Africa. 5, 1653–1661 (2022)
M.A. Hassan, A. Waseem, M.A. Johar, I.V. Bagal, J.-S. Ha, S.-W. Ryu, J. Mater. Chem. A. 8, 8300–8312 (2020)
Y. Jia, Z. Wang, X.-Q. Qiao, L. Huang, S. Gan, D. Hou, J. Zhao, C. Sun, D.-S. Li, Chem. Eng. J. 424, 130368 (2021)
M. Nami, S. Sheibani, F. Rashchi, Mater. Sci. Semicond. Process. 135, 106083 (2021)
H.M. Mousa, J.F. Alenezi, I.M.A. Mohamed, A.S. Yasin, A.-F.M. Hashem, A. Abdal-hay, J. Alloy. Compd. 886, 161169 (2021)
J. Deng, Y. Li, Y. Xiao, K. Feng, C. Lu, K. Nie, X. Lv, H. Xu, J. Zhong, ACS Catal. 12, 7833–7842 (2022)
L.T. Quynh, C.N. Van, W.Y. Tzeng, C.-W. Huang, Y.-H. Lai, J.-W. Chen, K.-A. Tsai, C.L. Wu, W.-W. Wu, C.W. Luo, Y.-J. Hsu, Y.-H. Chu, ACS Appl. Energy Mater. 1, 3900–3907 (2018)
M. Beshkova, R. Yakimova, Vacuum 176, 109231 (2020)
M. Shafa, D. Priante, R.T. ElAfandy, M.N. Hedhili, S.T. Mahmoud, T.K. Ng, B.S. Ooi, A. Najar, ACS Omega 4, 1678–1684 (2019)
Y. Yong, X. Su, H. Cui, Q. Zhou, Y. Kuang, X. Li, ACS Omega 2, 8888–8895 (2017)
T. Yuan, C. Fu, Y. Gong, Y. Tong, J. Zhang, Y. Wang, ACS Omega 6, 19127–19133 (2021)
Z. Wang, G. Wang, X. Liu, S. Wang, T. Wang, S. Zhang, J. Yu, G. Zhao, L. Zhang, J. Mater. Chem. C. 21, 3324 (2021)
Y. Wang, N. Song, X. Song, T. Zhang, D. Yang, M. Li, Vacuum 147, 18–23 (2018)
P. Delsing, A.N. Cleland, M.J.A. Schuetz, J. Knörzer, G. Giedke, J.I. Cirac, K. Srinivasan, M. Wu, K.C. Balram, C. Bäuerle, T. Meunier, C.J.B. Ford, P.V. Santos, E. Cerda-Méndez, H. Wang, H.J. Krenner, E.D.S. Nysten, M. Weiß, G.R. Nash, L. Thevenard, C. Gourdon, P. Rovillain, M. Marangolo, J.-Y. Duquesne, G. Fischerauer, W. Ruile, A. Reiner, B. Paschke, D. Denysenko, D. Volkmer, A. Wixforth, H. Bruus, M. Wiklund, J. Reboud, J.M. Cooper, Y. Fu, M.S. Brugger, F. Rehfeldt, C. Westerhausen, J. Phys. D Appl. Phys. 52, 353001 (2019)
D. Munk, M. Katzman, M. Hen, M. Priel, M. Feldberg, T. Sharabani, S. Levy, A. Bergman, A. Zadok, Nat. Commun. 10, 4214 (2019)
S. Zhang, R. Lu, H. Zhou, S. Link, Y. Yang, Z. Li, K. Huang, X. Ou, S. Gong, IEEE Trans. Microw. Theory Tech. 68, 3653–3666 (2020)
C. Wang, C. Wang, D. Jin, Y. Yu, F. Yang, Y. Zhang, Q. Yao, G.-J. Zhang, ACS Sens. 5, 362–369 (2020)
D. Li, X. Zu, D. Ao, Q. Tang, Y. Fu, Y. Guo, K. Bilawal, M.B. Faheem, L. Li, S. Li, Y. Tang, Sens. Actuators B Chem. 294, 55–61 (2019)
L. Lamanna, F. Rizzi, F. Guido, L. Algieri, S. Marras, V.M. Mastronardi, A. Qualtieri, M. De Vittorio, Adv. Electron. Mater. 5, 1900095 (2019)
A. Huang, H. Liu, O. Manor, P. Liu, J. Friend, Adv. Mater. 32, 1907516 (2020)
Y. Wang, X. Tao, R. Tao, J. Zhou, Q. Zhang, D. Chen, H. Jin, S. Dong, J. Xie, Y.Q. Fu, Sens. Actuators A 306, 111967 (2020)
C. Richard, A. Fakhfouri, M. Colditz, F. Striggow, R. Kronstein-Wiedemann, T. Tonn, M. Medina-Sánchez, O.G. Schmidt, T. Gemming, A. Winkler, Lab Chip 19, 4043–4051 (2019)
Y. Tang, X. Xu, S. Han, C. Cai, H. Du, H. Zhu, X. Zu, Y. Fu, Sens. Actuators B Chem. 304, 127395 (2020)
H. Xu, S. Fu, R. Su, J. Shen, F. Zeng, C. Song, F., Pan enhanced coupling coefficient in dual-mode zno/sic surface acoustic wave devices with partially etched Piezoelectric Layer. Appl. Sci. (2021). https://doi.org/10.3390/app11146383
J. Shen, S. Fu, R. Su, H. Xu, F. Zeng, C. Song, F., Pan systematical study of the basic properties of surface acoustic wave devices based on ZnO and GaN multilayers. Electronics (2021). https://doi.org/10.3390/electronics10010023
I. Ahmed, U. Rawat, J-T. Chen, D. Weinstein. Gan-on-sic surface acoustic wave devices up to 14.3 Ghz. in 2022 IEEE 35th International conference on micro electro mechanical systems conference (MEMS), (IEEE, 2022). https://doi.org/10.1109/MEMS51670.2022.9699670
JA. Bahamonde, H. Krishnaswamy, I. Kymissis. A tunable surface acoustic wave device on zinc oxide via acoustoelectric interaction with AIGaN/GaN 2DEG. in 2019 device research conference (DRC), (IEEE, 2019). https://doi.org/10.1109/DRC46940.2019.9046437