Analysis of liquid-type proof mass under oscillating conditions
Tóm tắt
In this study, the spring constant of an accelerometer with a liquid-type proof mass was analyzed. Unlike a general solid-type microelectromechanical system accelerometer, the Laplace pressure is considered a restoring force in the analyzed accelerometer. Using a base excitation mathematical model, the sensor output could be estimated for a specific spring constant. Although the estimated sensor output data fit well with the experimental results, the spring constant of the device could also be determined dynamically (for oscillations below 5 Hz). Moreover, the damping constants could be inferred depending on whether sandblasting treatment was performed. Finally, the effects of the oscillation, surface condition, and volume of liquid metal droplets on the spring constant were analyzed.
Tài liệu tham khảo
Shaeffer DK (2013) MEMS inertia sensors: a tutorial overview. IEEE Commun Mag 51(4):100–109. https://doi.org/10.1109/MCOM.2013.6495768
Li Q (2015) Fabrication of a high sensitivity MEMS accelerometer with symmetrical double-sided serpentine beam-mass structure. In: 2015 IEEE SENSORS, Busan, South Korea, 1–4 November 2015. https://doi.org/10.1109/icsens.2015.7370430
Zhou X (2015) Design and fabrication of a MEMS capacitive accelerometer with fully symmetrical double-sided H-shaped beam structure. Microelectron Eng 131:51–57. https://doi.org/10.1016/j.mee.2014.10.005
Sun CM (2008) On the sensitivity improvement of CMOS capacitive accelerometer. Sens Actuator A-Phys 141(2):347–352. https://doi.org/10.1016/j.sna.2007.10.026
Gomathi T (2016) Capacitive accelerometers for microelectromechanical applications: a review. In: 2016 ICCICCT, Kumaracoil, India, 16–17 December 2016. https://doi.org/10.1109/iccicct.2016.7987999
Mohammed Z (2018) Monolithic multi degree of freedom (MDoF) capacitive MEMS accelerometers. Micromachines 9(11):602. https://doi.org/10.3390/mi9110602
Partridge A (2000) A high-performance planar piezoresistive accelerometer. J Microelectromech Syst 9(1):58–66. https://doi.org/10.1109/84.825778
Hsieh HS (2011) A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer. In: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5–9 June 2011. https://doi.org/10.1109/transducers.2011.5969582
Park U (2014) A micromachined differential resonant accelerometer based on robust structural design. Microelectron Eng 129:5–11. https://doi.org/10.1016/j.mee.2014.06.008
Zhang J (2015) Microelectromechanical resonant accelerometer designed with a high sensitivity. Sensors 15(12):30293–30310. https://doi.org/10.3390/s151229803
Krause AG (2012) A high-resolution microchip optomechanical accelerometer. Nat Photonics 6:768–772. https://doi.org/10.1038/nphoton.2012.245
Cervantes FG (2014) High sensitivity optomechanical reference accelerometer over 10 kHz. Appl Phys Lett 104(22):221111. https://doi.org/10.1063/1.4881936
Langfelder G (2012) The dependence of fatigue in microelectromechanical systems on the environment and the industrial packaging. IEEE Trans Ind Electron 59(12):4938–4948. https://doi.org/10.1109/TIE.2011.2151824
Mariani S (2008) A three-scale FE approach to reliability analysis of MEMS sensors subject to impacts. Meccanica 43(5):469–483. https://doi.org/10.1007/s11012-008-9111-0
Park U (2010) Development of a MEMS digital accelerometer (MDA) using a microscale liquid metal droplet in a microstructured photosensitive glass channel. Sens Actuator A-Phys 159(1):51–57. https://doi.org/10.1016/j.sna.2010.02.011
Huh M (2017) Simple and robust resistive dual-axis accelerometer using a liquid metal droplet. Micro Nano Syst Lett 5:5. https://doi.org/10.1186/s40486-016-0038-2
Won D (2020) Capacitive-type two-axis accelerometer with liquid-type proof mass. Adv Electron Mater. https://doi.org/10.1002/aelm.201901265
Chen Y (2017) Aerodynamic breakup and secondary drop formation for a liquid metal column in a shock-induced cross-flow. In: 55th AIAA Aerospace Sciences Meeting, AIAA, Grapevine, United States, 9–13 January 2017. https://doi.org/10.2514/6.2017-1892