An investigation of unbalanced-magnetron sputtered TiAlN films on SKH51 high-speed steel
Tài liệu tham khảo
Munz, 1986, J. Vac. Sci. Technol. A, 4, 2717, 10.1116/1.573713
Knotek, 1987, J. Vac. Sci. Technol. A, 5, 2173, 10.1116/1.574948
Konig, 1991, Surf. Coat. Technol., 49, 316, 10.1016/0257-8972(91)90076-9
Leyendecker, 1991, Surf. Coat. Technol., 48, 175, 10.1016/0257-8972(91)90142-J
Knotek, 1987, J. Solid State Chem., 70, 318, 10.1016/0022-4596(87)90071-5
Shew, 1997, Thin Solid Films, 293, 212, 10.1016/S0040-6090(96)09038-4
Shew, 1995, Surf. Coat. Technol., 73, 66, 10.1016/0257-8972(94)02360-3
Window, 1986, J. Vac. Sci. Technol. A, 4, 196, 10.1116/1.573470
Sundgren, 1983, Thin Solid Films, 105, 353, 10.1016/0040-6090(83)90318-8
Perry, 1990, Surf. Coat. Technol., 42, 49, 10.1016/0257-8972(90)90114-R
Rickerby, 1988, Thin Solid Films, 157, 195, 10.1016/0040-6090(88)90004-1
Shew, 1995, Surf. Coat. Technol., 71, 30, 10.1016/0257-8972(94)02300-F
Monaghan, 1993, Surf. Coat. Technol., 59, 21, 10.1016/0257-8972(93)90049-T
Thomas, 1987, Surf. Eng., 3, 117, 10.1179/sur.1987.3.2.117
Bunshah, 1982, 109
P.L. Liu, Master Thesis, Institute of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, 1997.
Ikeda, 1991, Thin Solid Films, 195, 99, 10.1016/0040-6090(91)90262-V
Jindal, 1987, Thin Solid Films, 154, 362, 10.1016/0040-6090(87)90379-8