An investigation of unbalanced-magnetron sputtered TiAlN films on SKH51 high-speed steel

Surface and Coatings Technology - Tập 124 - Trang 97-103 - 2000
S.K. Wu1, H.C. Lin2, P.L. Liu1
1Institute of Materials Science and Engineering, National Taiwan University, Taipei 106, Taiwan
2Department of Materials Science, Feng Chia University, Taichung 407, Taiwan

Tài liệu tham khảo

Munz, 1986, J. Vac. Sci. Technol. A, 4, 2717, 10.1116/1.573713 Knotek, 1987, J. Vac. Sci. Technol. A, 5, 2173, 10.1116/1.574948 Konig, 1991, Surf. Coat. Technol., 49, 316, 10.1016/0257-8972(91)90076-9 Leyendecker, 1991, Surf. Coat. Technol., 48, 175, 10.1016/0257-8972(91)90142-J Knotek, 1987, J. Solid State Chem., 70, 318, 10.1016/0022-4596(87)90071-5 Shew, 1997, Thin Solid Films, 293, 212, 10.1016/S0040-6090(96)09038-4 Shew, 1995, Surf. Coat. Technol., 73, 66, 10.1016/0257-8972(94)02360-3 Window, 1986, J. Vac. Sci. Technol. A, 4, 196, 10.1116/1.573470 Sundgren, 1983, Thin Solid Films, 105, 353, 10.1016/0040-6090(83)90318-8 Perry, 1990, Surf. Coat. Technol., 42, 49, 10.1016/0257-8972(90)90114-R Rickerby, 1988, Thin Solid Films, 157, 195, 10.1016/0040-6090(88)90004-1 Shew, 1995, Surf. Coat. Technol., 71, 30, 10.1016/0257-8972(94)02300-F Monaghan, 1993, Surf. Coat. Technol., 59, 21, 10.1016/0257-8972(93)90049-T Thomas, 1987, Surf. Eng., 3, 117, 10.1179/sur.1987.3.2.117 Bunshah, 1982, 109 P.L. Liu, Master Thesis, Institute of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan, 1997. Ikeda, 1991, Thin Solid Films, 195, 99, 10.1016/0040-6090(91)90262-V Jindal, 1987, Thin Solid Films, 154, 362, 10.1016/0040-6090(87)90379-8