An investigation into dissociative mechanisms in nitrogenous glow discharges by optical emission spectroscopy

Davis, 1963, Phys Rev, 131, 219, 10.1103/PhysRev.131.219 Fancey, 1990, IEEE Trans Plasma Sci, 18, 869, 10.1109/27.61497 Fancey, 1987, Surf Coat Technol, 33, 17, 10.1016/0257-8972(87)90173-3 Leyland, 1990, Surf Coat Technol, 41, 295, 10.1016/0257-8972(90)90140-8 Fancey, 1990, Vacuum, 41, 2196, 10.1016/0042-207X(90)94223-D Coburn, 1980, J. Appl Phys, 51, 3134, 10.1063/1.328060 Howorka, 1978, J Chem Phys, 68, 804, 10.1063/1.435866 Rapp, 1965, J Chem Phys, 42, 4081, 10.1063/1.1695897 Maier, 1964, J Chem Phys, 41, 2174, 10.1063/1.1726222 McGowan, 1964, Can J Phys, 42, 2086, 10.1139/p64-193 1977, 56 Petitjean, 1984, J Phys D: Appl Phys, 17, 919, 10.1088/0022-3727/17/5/008 Maier, 1971, J Chem Phys, 55, 2699, 10.1063/1.1676482 Maier, 1973, J Chem Phys, 59, 4501, 10.1063/1.1680650 Chapman, 1980, Glow Discharge Processes, 52 Winters, 1966, J Chem Phys, 44, 1472, 10.1063/1.1726879 Rapp, 1965, J Chem Phys, 43, 1464, 10.1063/1.1696957 Fancey, 1991, 140 Poitevin, 1984, Thin Solid Films, 120, 223, 10.1016/0040-6090(84)90298-0 Lemperiere, 1987, Vacuum, 37, 825, 10.1016/0042-207X(87)90182-5 Amme, 1965, J Chem Phys, 42, 2011, 10.1063/1.1696238 Parlant, 1987, J Chem Phys, 86, 6183, 10.1063/1.452456 Viggiano, 1990, J Chem Phys, 93, 4761, 10.1063/1.458666 Hudis, 1973, J Appl Phys, 44, 1489, 10.1063/1.1662398 Jones, 1975, 71 Staines, 1981, Thin Solid Films, 86, 201, 10.1016/0040-6090(81)90289-3 Grill, 1983, Thin Solid Films, 101, 219, 10.1016/0040-6090(83)90248-1 Xu, 1987, Surf Eng, 3, 226, 10.1179/sur.1987.3.3.226 Rusnak, 1993, J Phys D: Appl Phys, 26, 585, 10.1088/0022-3727/26/4/010 Korhonen, 1982, Thin Solid Films, 96, 103, 10.1016/0040-6090(82)90218-8 Matthews, 1985, J Vac Sci Technol A, 3, 2354, 10.1116/1.572881 Leyland, 1991, Surf Eng, 7, 207, 10.1179/sur.1991.7.3.207 Van Stappen, 1991, Mater Sci Eng, A140, 554, 10.1016/0921-5093(91)90478-6 D'Haen, 1993, Surf Coat Technol, 61, 194, 10.1016/0257-8972(93)90225-D Meletis, 1993, J Vac Sci Technol A, 11, 25, 10.1116/1.578712 Fancey, 1990, Thin Solid Films, 193/194, 171, 10.1016/S0040-6090(05)80025-2