All-optical dynamic analysis of the photothermal and photoacoustic response of a microcantilever by laser Doppler vibrometry
Tài liệu tham khảo
Johnson, 2012, Biosensing using dynamic-mode cantilever sensors: a review, Biosens. Bioelectron., 32, 1, 10.1016/j.bios.2011.10.054
Nazemi, 2019, Advanced micro-and nano-gas sensor technology: a review, Sensors, 19, 1285, 10.3390/s19061285
Shen, 2017, AFM tip-sample convolution effects for cylinder protrusions, Appl. Surf. Sci., 422, 482, 10.1016/j.apsusc.2017.06.053
Chavan, 2011, Note: Ferrule-top atomic force microscope. II. Imaging in tapping mode and at low temperature, Rev. Sci. Instrum., 82, 10.1063/1.3579496
Tamayo, 2012, Deformation, contact time, and phase contrast in tapping mode scanning force microscopy, Langmuir, 66, 309
Volkov, 2020, Photoacoustic and photothermal methods in spectroscopy and characterization of soils and soil organic matter, Photoacoustics, 17, 10.1016/j.pacs.2019.100151
Ziegler, 2004, Cantilever-based biosensors, Anal. Bioanal. Chem., 379, 946
Baumgartel, 2012, Resonance-enhanced piezoelectric microphone array for broadband or prefiltered acoustic sensing, J. Microelectromechanical Syst., 22, 107, 10.1109/JMEMS.2012.2216505
Yoon, 2018, Impact of depth-dependent optical attenuation on wavelength selection for spectroscopic photoacoustic imaging, Photoacoustics, 12, 46, 10.1016/j.pacs.2018.10.001
Oraevsky, 2015, Contrast agents for optoacoustic imaging: design and biomedical applications, Photoacoustics, 3, 1, 10.1016/j.pacs.2015.01.002
Rossi, 2021, Photoacoustic characteristics of carbon-based infrared absorbers, Photoacoustics, 23, 10.1016/j.pacs.2021.100265
Koskinen, 2007, Cantilever enhanced photoacoustic detection of carbon dioxide using a tunable diode laser source, Appl. Phys. B, 86, 451, 10.1007/s00340-006-2560-z
Sievilä, 2007, Fabrication and characterization of an ultrasensitive acousto-optical cantilever, J. Micromechanics Microengineering, 17, 852, 10.1088/0960-1317/17/5/002
Iannuzzi, 2007, Fibre-top cantilevers: design, fabrication and applications, Meas. Sci. Technol., 18, 3247, 10.1088/0957-0233/18/10/S30
Gruca, 2010, Ferrule-top micromachined devices: design, fabrication, performance, Meas. Sci. Technol., 21, 10.1088/0957-0233/21/9/094033
Sheng, 2017, Demonstration of a highly sensitive photoacoustic spectrometer based on a miniaturized all-optical detecting sensor, Opt. Express, 25, 17541, 10.1364/OE.25.017541
Talukdar, 2015, Piezotransistive transduction of femtoscale displacement for photoacoustic spectroscopy, Nat. Commun., 6, 7885, 10.1038/ncomms8885
Peltola, 2013, High sensitivity trace gas detection by cantilever-enhanced photoacoustic spectroscopy using a mid-infrared continuous-wave optical parametric oscillator, Opt. Express, 21, 10240, 10.1364/OE.21.010240
Hirschmann, 2013, Sub-ppb detection of formaldehyde with cantilever enhanced photoacoustic spectroscopy using quantum cascade laser source, Appl. Phys. B, 111, 603, 10.1007/s00340-013-5379-4
Lehtinen, 2013, Human hair in the identification of cocaine abuse with cantilever-enhanced photoacoustic spectroscopy and principal component analysis, Appl. Spectrosc., 67, 846, 10.1366/12-06904
Zhang, 2016, Cantilever enhanced photoacoustic spectrometry: quantitative analysis of the trace H2S produced by SF6 decomposition, Infrared Phys. Technol., 78, 31, 10.1016/j.infrared.2016.07.004
Ma, 2021, Detection of trace C2H2 in N2 buffer gas with cantilever-enhanced photoacoustic spectrometer, Optik, 232, 10.1016/j.ijleo.2021.166525
Wilcken, 2003, Optimization of a microphone for photoacoustic spectroscopy, Appl. Spectrosc., 57, 1087, 10.1366/00037020360695946
Kuusela, 2009, Photoacoustic gas detection using a cantilever microphone and III–V mid-IR LEDs, Vib. Spectrosc., 51, 289, 10.1016/j.vibspec.2009.08.001
Gong, 2021, Ppb-level detection of methane based on an optimized T-type photoacoustic cell and a NIR diode laser, Photoacoustics, 21, 10.1016/j.pacs.2020.100216
Michal, 2018, Cantilever-enhanced photoacoustic detection and infrared spectroscopy of trace species produced by biomass burning, Energy Fuels, 32, 10163, 10.1021/acs.energyfuels.8b01021
Latif, 2020, Hermetically packaged microsensor for quality factor-enhanced photoacoustic biosensing, Photoacoustics, 18, 10.1016/j.pacs.2020.100189
Russo, 2020, Photoacoustic spectroscopy for gas sensing: a comparison between piezoelectric and interferometric readout in custom quartz tuning forks, Photoacoustics, 17
Sampaolo, 2021, H2S quartz-enhanced photoacoustic spectroscopy sensor employing a liquid-nitrogen-cooled THz quantum cascade laser operating in pulsed mode, Photoacoustics, 21, 100219, 10.1016/j.pacs.2020.100219
Zheng, 2020, Quartz-enhanced photoacoustic spectroscopy employing pilot line manufactured custom tuning forks, Photoacoustics, 17, 10.1016/j.pacs.2019.100158
Russo, 2021, Quartz-enhanced photoacoustic spectroscopy exploiting low-frequency tuning forks as a tool to measure the vibrational relaxation rate in gas species, Photoacoustics, 21
Russo, 2020, Photoacoustic spectroscopy for gas sensing: a comparison between piezoelectric and interferometric readout in custom quartz tuning forks, Photoacoustics, 17, 100155, 10.1016/j.pacs.2019.100155
Pinto, 2021, Parts-per-billion detection of carbon monoxide: a comparison between quartz-enhanced photoacoustic and photothermal spectroscopy, Photoacoustics, 22, 100244, 10.1016/j.pacs.2021.100244
Ruppert, 2017, Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing, Rev. Entific Instruments, 88
Leadenham, 2015, Unified nonlinear electroelastic dynamics of a bimorph piezoelectric cantilever for energy harvesting, sensing, and actuation, Nonlinear Dyn., 79, 1727, 10.1007/s11071-014-1770-x
Herruzo, 2007, Frequency response of an atomic force microscope in liquids and air: magnetic versus acoustic excitation, Appl. Phys. Lett., 91, 10.1063/1.2794426
O’Shea, 2005, Out-of-plane electrostatic actuation of microcantilevers, Nanotechnology, 16, 602, 10.1088/0957-4484/16/4/045
Panaitov, 2013, U-shaped bimorph micro-electromechanical cantilevers with combined thermal/electrostatic actuation, Microelectron. Eng., 112, 126, 10.1016/j.mee.2012.02.027
Tian, 2018, A novel method and system for calibrating the spring constant of atomic force microscope cantilever based on electromagnetic actuation, Rev. Sci. Instrum., 89, 10.1063/1.5051401
Somnath, 2014, Multifunctional atomic force microscope cantilevers with Lorentz force actuation and self-heating capability, Nanotechnology, 25, 10.1088/0957-4484/25/39/395501
Yamashita, 2007, Tip-sample distance control using photothermal actuation of a small cantilever for high-speed atomic force microscopy, Rev. Sci. Instrum., 78, 1577, 10.1063/1.2766825
Merced, 2012, Photothermal actuation of V O2:Cr-coated microcantilevers in air and aqueous media, Smart Mater. Struct., 21, 105009, 10.1088/0964-1726/21/10/105009
Demirkiran, 2018, Analysis of microcantilevers excited by pulsed-laser-induced photoacoustic waves, Opt. Express, 26, 4906, 10.1364/OE.26.004906
Gao, 2016, Microcantilever actuation by laser induced photoacoustic waves, Sci. Rep., 6, 19935, 10.1038/srep19935
Todorovic, 2017, Study of silicon cantilevers by the photoacoustic elastic bending method, Int. J. Thermophys., 38, 1, 10.1007/s10765-016-2175-5
Zhang, 2017, Cantilever optimization for applications in enhanced harmonic atomic force microscopy, Sens. Actuators A Phys., 255, 54, 10.1016/j.sna.2017.01.003
Rezaeisaray, 2015, Low frequency piezoelectric energy harvesting at multi vibration mode shapes, Sens. Actuators A Phys., 228, 104, 10.1016/j.sna.2015.02.036
Han, 1999, Dynamics of transversely vibrating beams using four engineering theories, J. Sound Vib., 225, 935, 10.1006/jsvi.1999.2257
Clough, 1995
Schey, 2005