Adhesion, friction, and wear of plasma-deposited thin silicon nitride films at temperatures to 700 °C

Wear - Tập 133 - Trang 107-123 - 1989
K. Miyoshi1, J.J. Pouch1, S.A. Alterovitz1
1National Aeronautics and Space Administration, Lewis Research Center, Cleveland, OH 44135 U.S.A.

Tài liệu tham khảo

Kiser, 1987, Ceramics for Engines, Aeropropulsion '87,, 103 Sliney, 1987, Self-lubricating coatings for high-temperature applications, Aeropropulsion '87, 89 Brindley, 1987, Development of a new generation of high-temperature composite materials, 73 Buckley, 1981, Surface Effects in Adhesion, Ponction, Wear, and Lubrication, 245 Czichos, 1984, Review on wear research — activities in the F.R.G., Wear, 100, 579, 10.1016/0043-1648(84)90034-6 Hintermann, 1984, Adhesion, friction and wear of thin hard coatings, Wear, 100, 381, 10.1016/0043-1648(84)90023-1 Halling, 1984, Ceramic coatings in the war on wear, Wear, 100, 367, 10.1016/0043-1648(84)90022-X Schintlmeister, 1984, Cutting tool materials coated by chemical vapour deposition, Wear, 100, 153, 10.1016/0043-1648(84)90011-5 Miyoshi, 1985, Tribological properties of boron nitride synthesized by ion beam deposition, J. Vac. Sci. Technol. A, 3, 2340, 10.1116/1.572878 Miyoshi, 1987, Adhesion, friction and deformation of ion-beam-deposited boron nitride films, Vol. 2, 621 Miyoshi, 1987, Mechanical strength and tribological behavior of ion-beam-deposited boron nitride films on nonmetallic substrates, Surf. Coatings Technol., 33, 221, 10.1016/0257-8972(87)90190-3 Pouch, 1987, Boron nitride: composition, optical properties, and mechanical behavior, Vol. 93, 323 Valco, 1985, Role of GaAs surface cleaning in plasma deposition of silicon nitride films for encapsulated annealing, J. Vac. Sci. Technol. A, 3, 1020, 10.1116/1.573113 Valco, 1986, Encapsulated annealing of InP substrates, Vol. 86-3, 209 Miyoshi, 1988, Development of a torsion balance for adhesion measurements, 263 1985 Tabor, 1983, Status and direction of tribology as a science in the 80's — understanding and prediction, Vol. 1, 1 Bowden, 1950, The Friction and Lubrication of Solids, 10 Bowden, 1964, The Friction and Lubrication of Solids, 173 Miyoshi, 1979, Friction, deformation and fracture of single-crystal silicon carbide, ASLE Trans., 22, 79, 10.1080/05698197908982905