Adhesion and debonding of multi-layer thin film structures

Engineering Fracture Mechanics - Tập 61 Số 1 - Trang 141-162 - 1998
Reinhold H. Dauskardt1, Michael Lane1, Qing Ma2, Nety Krishna3
1Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205, USA
2Intel Corporation Santa Clara, CA 95054, USA
3Applied Materials Corporation, Santa Clara, CA 95054, USA

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Tài liệu tham khảo

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