Absolute interferometric test for high numerical-aperture spherical concave surfaces: Gravitational effect

Measurement - Tập 94 - Trang 920-926 - 2016
Kenichi Hibino1, Ryohei Hanayama2, Yangjin Kim3
1National Metrology Institute of Japan, National Institute of Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan
2The Graduate School for the Creation of New Photonics Industries, Hamamatsu, Shizuoka 431-1202, Japan
3Graduate School of Mechanical Engineering, Pusan National University 2, Busandaehak-ro 63 beon-gil, Geumjeong-gu, Busan 46241, Repubilc of Korea

Tài liệu tham khảo

G. Schultz, J. Schwider, Interferometric testing of smooth surfaces, in: Progress in Optics (North-Holland, Amsterdam), vol. 13, 1976, pp. 93–167. Truax, 1988, Absolute interferometric testing of spherical surfaces, advances in fabrication and metrology for optics and large optics, Proc. SPIE, 966, 130, 10.1117/12.948058 Burke, 2008, Rapid and reliable reference sphere calibration for Fizeau interferometry, Opt. Lett., 33, 2536, 10.1364/OL.33.002536 Malacara, 2007, Absolute calibration phase shifting interferometer Burke, 2012, Calibrating the sag due to gravity of horizontal interferometer reference flats, Interferometry XVI: techniques and analysis, Proc. SPIE, 8493, 84930F, 10.1117/12.929968 de Groot, 2000, Measurement of transparent plates with wavelength-tuned phase-shifting interferometry, Appl. Opt., 39, 2658, 10.1364/AO.39.002658