AFM analysis of wobble amplitude
Tóm tắt
We directly measure track wobble amplitude in recordable optical disc media using AFM images and automated analysis procedures. Wobble amplitude of 30 nm is easily measured, but calibration is important in order to avoid errors.
Từ khóa
#Size measurement #Image analysis #Optical microscopy #Spirals #Atomic force microscopy #Optical recording #Calibration #Manufacturing #Timing #TrajectoryTài liệu tham khảo
0, DVD+RW image courtesy of Paul van Roosmalen and Elise Rodenburg
donald, 1999, Automated, high precision measurement of critical dimensions using the Atomic Force Microscope, J Vac Sci Technol, a 17