A valve-less planar fluid pump with two pump chambers

Sensors and Actuators A: Physical - Tập 47 Số 1-3 - Trang 549-556 - 1995
A. C. Thorsen1, Göran Stemme1, E. Stemme2
1Instrumentation Laboratory, Royal Institute of Technology, S-100 44 Stockholm, Sweden
2Department of Computer Engineering, Chalmers University of Technology, S-412 96 Göteborg, Sweden

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