A step-and-repeat UV-nanoimprint lithography process using an elementwise patterned stamp

Microelectronic Engineering - Tập 82 - Trang 180-188 - 2005
Jun-ho Jeong1, Ki-don Kim1, Young-suk Sim1, Hyonkee Sohn2, Eung-sug Lee1
1Department of Intelligent Precision Machine, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon 305343, Republic of Korea
2Department of Advanced Industrial Technology, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseong-gu, Daejeon, Republic of Korea

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Microelectronic Engineering

Tập 82

180-188

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