A simple projection photolithography method for low-cost rapid prototyping of microfluidic chips
Tóm tắt
Presented herein is a masking method for SU8 based soft lithography which utilizes a simple optical setup using transparencies printed with a commercial standard office printer. The relatively low printing quality of the printer is partly overcome by imaging of the mask with negative magnification that utilizes relatively cheap and easily available parts. The imaging quality as well as the quality of the resulting SU8 master is assessed by means of microscopic imaging.
Tài liệu tham khảo
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