A silicon-based fuel cell micro power system using a microfabrication technique

Journal of Micromechanics and Microengineering - Tập 16 Số 10 - Trang 2014-2020 - 2006
Zhiyong Xiao1, Guizhen Yan1,2, Chunhua Feng3, P.C.H. Chan1, I‐Ming Hsing3
1Department of Electronic & Computer Engineering, Hong Kong University of Science & Technology, Hong Kong SAR, People’s Republic of China
2Institute of Microelectronics, Peking University, Beijing, People's Republic of China
3Department of Chemical Engineering, Hong Kong University of Science & Technology, Hong Kong SAR, People's Republic of China

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