A review of 2D and 3D plasmonic nanostructure array patterns: fabrication, light management and sensing applications

Nanophotonics - Tập 8 Số 12 - Trang 2065-2089 - 2019
Sujan Kasani1,2, Kathrine Curtin1, Nianqiang Wu3,1,4
1Department of Mechanical and Aerospace Engineering, West Virginia University, Morgantown, WV 26506-6106, USA
2Lane Department of Computer Science and Electrical Engineering, West Virginia University, Morgantown, WV, 26506, USA.
3C. Eugene Bennett Department of Chemistry, West Virginia University, Morgantown, WV 26506-6045, USA
4Department of Pharmaceutical Science , West Virginia University , Morgantown, WV 26506-9530 , USA , Phone: +1-304-293-3326

Tóm tắt

Abstract This review article discusses progress in surface plasmon resonance (SPR) of two-dimensional (2D) and three-dimensional (3D) chip-based nanostructure array patterns. Recent advancements in fabrication techniques for nano-arrays have endowed researchers with tools to explore a material’s plasmonic optical properties. In this review, fabrication techniques including electron-beam lithography, focused-ion lithography, dip-pen lithography, laser interference lithography, nanosphere lithography, nanoimprint lithography, and anodic aluminum oxide (AAO) template-based lithography are introduced and discussed. Nano-arrays have gained increased attention because of their optical property dependency (light-matter interactions) on size, shape, and periodicity. In particular, nano-array architectures can be tailored to produce and tune plasmonic modes such as localized surface plasmon resonance (LSPR), surface plasmon polariton (SPP), extraordinary transmission, surface lattice resonance (SLR), Fano resonance, plasmonic whispering-gallery modes (WGMs), and plasmonic gap mode. Thus, light management (absorption, scattering, transmission, and guided wave propagation), as well as electromagnetic (EM) field enhancement, can be controlled by rational design and fabrication of plasmonic nano-arrays. Because of their optical properties, these plasmonic modes can be utilized for designing plasmonic sensors and surface-enhanced Raman scattering (SERS) sensors.

Từ khóa


Tài liệu tham khảo

Gleiter H. Nanostructured materials: basic concepts and microstructure. Acta Mater 2000;48:1–29.10.1016/S1359-6454(99)00285-2

Maier SA. Plasmonics: fundamentals and applications. New York, NY: Springer, 2007.

Murray WA, Astilean S, Barnes WL. Transition from localized surface plasmon resonance to extended surface plasmon-polariton as metallic nanoparticles merge to form a periodic hole array. Phys Rev B 2004;69:165407, 1–7.

Henglein A. Small particle research: physicochemical properties of extremely small colloidal metal and semiconductor particles. Chem Rev 1989;89:1861–73.10.1021/cr00098a010

Willets KA, Van Duyne RP. Localized surface plasmon resonance spectroscopy and sensing. Annu Rev Phys Chem 2007;58: 267–97.10.1146/annurev.physchem.58.032806.10460717067281

Blatchford CG, Campbell JR, Creighton JA. Plasma resonance-enhanced Raman scattering of absorbates on sold colloids: the effects of aggregation. J A Surf Sci 1982;120:435–55.10.1016/0039-6028(82)90161-3

Xu H, Aizpurua J, Kall M, Apell P. Electromagnetic contributions to single-molecule sensitivity in surface-enhanced Raman scattering. Phys Rev E 2000;62:4318–24.10.1103/PhysRevE.62.4318

Kneipp K, Kneipp H, Manoharan R, et al. Extremely large enhancement factors in surface-enhanced Raman scattering for molecules on colloidal gold clusters. Appl Spectrosc 1998;52:1493–7.10.1366/0003702981943059

Wang W, Ramezani M, Väkeväinen AI, Törmä P, Gómez Rivas J, Odom TW. The rich photonic world of plasmonic nanoparticle arrays. Mater Today 2018;21:303–14.10.1016/j.mattod.2017.09.002

Zheng P, Cushing SK, Suri S, Wu N. Tailoring plasmonic properties of gold nanohole arrays for surface-enhanced Raman scattering. Phys Chem Chem Phys 2015;17:21211–9.10.1039/C4CP05291A25586930

Van der Zande B, Bohmer MR, Fokkink LGJ, Schonenberger C. Aqueous gold sols of rod-shaped particles. J Phys Chem B 1997;101:852–4.10.1021/jp963348i

Zheng P, Kasani S, Wu N. Detection of nitrite with a surface-enhanced Raman scattering sensor based on silver nanopyramid array. Anal Chim Acta 2018;1040:158–65.3032710610.1016/j.aca.2018.08.022

Kasani S, Zheng P, Wu N. Tailoring optical properties of large area plasmonic gold nano-ring array pattern. J Phys Chem C 2018;122:13443–9.10.1021/acs.jpcc.7b11660

Zheng P, Tang H, Liu B, Kasani S, Luang L, Wu N. Origin of strong and narrow localized surface plasmon resonance of copper nanocubes. Nano Res 2019;12:63–8.10.1007/s12274-018-2178-6

Zheng P, Kasani S, Wu N. Converting plasmonic light scattering to confined light absorption and creating plexcitons by coupling a gold nano-pyramid array onto a silica-gold film. Nanoscale Horiz 2019;4:516–25.3146308010.1039/C8NH00286J

Garcia de Abajo F J. Colloquium: Light scattering by particle and hole arrays. Rev Mod Phys 2007;79:1267–90.10.1103/RevModPhys.79.1267

Li H, Cullum BM. Dual layer and multilayer enhancements from silver film over nanostructured surface-enhanced Raman substrates. Appl Spectrosc 2005;59:410–7.1590132510.1366/0003702053641379

Raman CV. A new radiation. Indian J Phys 1928;2:387–98.

Gardiner DJ. Practical Raman spectroscopy. Berlin, Heidelberg: Springer-Verlag, 1989.

Fleischmann M, Hendra PJ, McQuillan AJ. Raman spectra of pyridine absorbed at a silver electrode. Chem Phys Lett 1974;26:163–6.10.1016/0009-2614(74)85388-1

Kneipp K, Wang Y, Kneipp H, et al. Single molecule detection using surface-enhanced Raman scattering (SERS). Phys Rev Lett 1997;78:1667–70.10.1103/PhysRevLett.78.1667

Nie S. Probing single molecules and single nanoparticles by surface-enhanced Raman scattering. Emory, Science 1997;275:1102–6.

Chang TH, Nixon P. Record of the 9th Symposium on Electron, Ion and Laser Beam Technology, Berkeley, CA, USA, 1967, 123.

Tseng AA, Chen K, Chen CD, Ma KJ. Electron beam lithography in nanoscale fabrication: recent development. In: IEEE Transactions on Electronics Packaging Manufacturing, Piscataway, NJ, USA, vol. 26, 2003,141–9.

Atlissimo A. E-beam lithography for micro-/nanofabrication. Biomicrofluidics 2010;4:026503.10.1063/1.3437589

Saifullah MSM, Ondarcuhu T, Koltsov DK, Joachim C, Welland ME. A reliable scheme for fabricating sub-5 nm co-planar junctions for single-molecule detection. Nanotechnology 2002;13:659–62.10.1088/0957-4484/13/5/323

Broers A, Molzen W, Cuomo J, Wittels N. Electron beam fabrication of 80 Å metal structures. Appl Phys Lett 1976;29:596–8.10.1063/1.89155

Broers A. Fabrication limits of electron beam lithography and of UV, X-ray and ion beam lithographies. Phil Trans R Soc Lond A 1995; 353:291–311.10.1098/rsta.1995.0101

Arshak K, Mihova M. State-of-the-art focused ion beam nanolithography. J Optoelectron Adv Mat 2005;7:193–8.

Matsui S, Kojima Y, Ochiai Y, Honda T. High-resolution focused ion beam lithography. J Vac Sci Technol B 1991;9:2622–32.10.1116/1.585660

Matsui S, Mori K, Saigo K, Shiokawa T, Toyoda K, Namba S. Lithographic approach for 100 nm fabrication by focused ion beam. J Vac Sci Technol 1986;4:845.10.1116/1.583524

Gamo K. Nanofabrication by FIB. Microelectron Eng 1996;32:159–71.10.1016/0167-9317(96)00003-2

Piner RD, Zhu J, Xu F, Hong S H, Mirkin CA. “Dip-pen” lithography. Science 1999;283:661–3.

Ginger DS, Zhang H, Mirkin CA. The evolution of dip-pen nanolithography. Angew Chem Int Ed 2004;43:30–45.10.1002/anie.200300608

Mirkin CA. The power of the pen: development of massively parallel dip-pen nanolithography. ACS Nano 2007;1:79–83.10.1021/nn700228m19206523

Salaita K, Wang Y, Fragala J, Vega RA, Liu C, Mirkin CA. Massively parallel dip-pen nanolithography with 55,000-pen two-dimensional arrays. Angew Chem Int Ed 2006;4:7220–3.

Roy S. Fabrication of micro- and nano-structured materials using mask-less processes. J Phys D: Appl Phys 2007;40:413–26.10.1088/0022-3727/40/22/R02

Rodriquez A, Echeverria M, Ellman M, et al. Laser interference lithography for nanoscale structuring of materials: From laboratory to industry. Microelectron Eng 2009;86:937–40.10.1016/j.mee.2008.12.043

Moon JH. Multiple-exposure holographic lithography with phase shift. Appl Phys Lett 2004;85:4184.10.1063/1.1813644

Byun I, Kim J. Cost-effective laser interference lithography using a 405 nm AlInGaN semiconductor laser. Micromech Microeng 2010;20:055024.10.1088/0960-1317/20/5/055024

Helgert M, Burkhardt M, Rudolf K, Steiner R, Brunner R. High-frequent structures generated by interference lithography in the DUV. In: Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest. Washington, DC, USA, Optical Society of America, 2004.

O’Reilly TB, Smith HI. Linewidth uniformity in Lloyd’s mirror interference lithography systems. J Vac Sci Technol B 2008;26:2131–4.10.1116/1.3013391

Pieranki P. Two-dimensional interfacial colloidal crystals. Physical Rev Lett 1980;45:569–72.10.1103/PhysRevLett.45.569

Dimitrov AS, Nagayama K. Continuous convective assembling of fine particles into two-dimensional arrays on solid surfaces. Langmuir 1996;12:1303–11.10.1021/la9502251

Rossi RC, Tan MX, Lewis NS. Size-dependent electrical behavior of spatially inhomogeneous barrier height regions on silicon. Appl Phys Lett 2000;77:2698–700.10.1063/1.1319534

Hulteen JC, Van Duyne R. Nanosphere lithography: a materials general fabrication process for periodic particle array surfaces. J Vac Sci Technol A 1995;13:1553.10.1116/1.579726

Deckman HW, Dunsmuir JH. Natural lithography. Appl Phys Lett 1982;41:377–9.10.1063/1.93501

Ruan WD, Lu ZC, Ji N, Wang CX, Zhao B, Zhang JH. Facile fabrication of large area polystyrene colloidal crystal monolayer via surfactant-free Langmuir–Blodgett technique. Chem Res Chinese Universities 2007;23:712–4.10.1016/S1005-9040(07)60155-X

Tabatabaei M, Sangar A, Kazemi-Zanjani N, Torchio P, Merlen A, Langugne-Labarthet F. Optical properties of silver and gold tetrahedral nanopyramid arrays prepared by nanosphere lithography. J Phys Chem C 2013;117:14778–86.10.1021/jp405125c

Bartlett PN, Birkin PR, Ghanem MA. Electrochemical deposition of microporous platinum, palladium, and cobalt films using polystyrene latex sphere templates. Chem Commun 2000;17:1671–2.

Hulteen JC, Treichel D, Smith M, Duval M, Jenson T, Van-Duyne R. Nanosphere lithography: size-tunable silver nanoparticle and surface cluster arrays. J Phys Chem B 1999;103:3854–63.10.1021/jp9904771

Chou SY, Krauss PR, Renstrom P J. Imprint of sub-25 nm via and trenches in polymers. Appl Phys Lett 1995;67:3114.10.1063/1.114851

Chou S, Krauss P. Imprint lithography with sub-10nm feature size and high throughput. Elsevier Sci 1997;35:237–40.

Hua F, Sun Y, Gaur A, et al. Polymer imprint lithography with molecular-scale resolution. Nano Lett 2004;4:2467–71.10.1021/nl048355u

Lan H, Ding Y. Nanoimprint lithography. In: Wang M, editor. Lithography. Rijeka: InTech, 2010;457–94.

Colburn M, Johnson S, Stewart M, et al. Step and flash imprint lithography: a new approach to high-resolution patterning. Proc SPIE 1999;3676:379–89.10.1117/12.351155

Malinovskis U, Poplausks R, Apsite I, et al. Ultrathin anodic aluminum oxide membranes for production of dense sub-20 nm nanoparticle arrays. J Phys Chem C 2014;118:8685–90.10.1021/jp412689y

Su Z, Zhou W. Formation mechanism of porous anodic aluminium and titanium oxides. Adv Mater 2008;20:3663–7.10.1002/adma.200800845

Qiu T, Zhang W, Lang X, Zhou Y, Cui T, Chu PK. Controlled assembly of highly Raman-enhancing silver nanocap arrays templated by porous anodic alumina membranes. Small 2009;5:2333–7.10.1002/smll.20090057719548279

Al-Kaysi RO, Ghaddar TH, Guirad G. Fabrication of one-dimensional organic nanostructures using anodic aluminum oxide templates. J Nanomater 2009, Article ID 436375, 14.

Pimpin A, Srituravanich W. Review on micro- and nanolithography techniques and their applications. Eng J 2011;16:37–56.

Madou MJ. Fundamentals of microfabrication: the science of miniaturization. 2nd ed. New York: CRC Press, 2002.

Gates BD, Xu Q, Stewart M, Ryan D, Willson CG, Whitesides GM. New approaches to nanofabrication: Molding, printing, and other techniques. Chem Rev 2005;105:1171–96.1582601210.1021/cr030076o

Altissimo M. E-beam lithography for micro/nanofabrication. Biomicrofluidics 2010;4:3–6.

Liu H, Luo Y, Kong W, et al. Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons. Optical Mater Exp 2018;8:199–209.10.1364/OME.8.000199

Whitney AV, Myers BD, Van Duyne RP. Sub-100 nm triangular nanopores fabricated with the reactive ion etching variant of nanosphere lithography and angle-resolved nanosphere lithography. Nano Letters 2004;4:1507–11.10.1021/nl049345w

Popat KC, Mor G, Grimes CA, Desai TA. Surface modification of nanoporous alumina surfaces with poly ethylene glycol. Langmuir 2004;20:8035–41.1535006910.1021/la049075x

Powell CJ, Swan JB. Effect of oxidation on the characteristic loss spectra of aluminium and magnesium. Phys Rev 1960;118:640–3.10.1103/PhysRev.118.640

Pines D, Bohm D. A collective description of electron interactions. I. Magnetic interactions. Physl Rev 1951;82:625–34.10.1103/PhysRev.82.625

Pines D, Bohm D. A collective description of electron interactions: II. Collective vs individual particle aspects of the interactions. Phys Rev 1952;85:338–53.10.1103/PhysRev.85.338

Pines D, Bohm D. A collective description of electron interactions: III. Coulomb interactions in a degenerate electron gas. Phys Rev 1953;92:609–26.10.1103/PhysRev.92.609

Jeanmaire DL, Van Duyne RP. J. Surface Raman spectroelectrochemistry Part 1: Heterocyclic, aromatic, and aliphatic amines absorbed on the anodized silver electrode. Electroanal Chem 1977;8:1–20.

Albrecht MG. Creighton. Anomalously intense Raman spectra of pyridine at a silver electrode. J Am Chem Soc 1977;99:5215–7.10.1021/ja00457a071

Haes AJ, Van Duyne RP. A Nanoscale optical biosensor: sensitivity and selectivity of an approach based on the localized surface plasmon resonance spectroscopy of triangular silver nanoparticles. J Am Chem Soc 2002;124:10596–604.10.1021/ja020393x12197762

Hirsch LR, Jackson JB, Lee A, Halas NJ, West JL. A Whole blood immunoassay using gold nanoshells. Anal Chem 2003;75:2377–81.1291898010.1021/ac0262210

Sokolov K, Chumanov G, Cotton TM. Enhancement of molecular fluorescence near the surface of colloidal metal films. Anal Chem 1998;70:3898–905.975102810.1021/ac9712310

Zeng J, Liang D, Cao ZX. Applications of optical fiber SPR sensor for measuring of temperature and concentration of liquids. Proc SPIE 2005;5855:667–70.10.1117/12.623375

Li M, Cushing SK, Wu N. Plasmon-enhanced optical sensors: a review. Analyst 2015;140:386–406.2536582310.1039/C4AN01079E

Anker JN, Hall WP, Lyandres O, Shah NC, Zhao J, Van Duyne RP. Biosensing with plasmonic nanosensors. Nat Mater 2008;7:442–53.1849785110.1038/nmat2162

Haes AJ, Van Duyne RP. A unified view of propagating and localized surface plasmon resonance biosensors. Anal Bioanal Chem 2004;379:920–30.10.1007/s00216-004-2708-915338088

Mie G. Beitrge zur optik tr¨uber medien, speziell kolloidaler metal osungen. Annalen Der Physik 1908;330:377–445.10.1002/andp.19083300302

Gans R. Uber die Form ultramikroskopischer Goldteilchen. Ann Phys 1912;37:881–900.

Camden JP, Dieringer JA, Wang Y, et al. Probing the structure of single-molecule surface-enhanced Raman scattering hot spots. J Am Chem Soc 2008;130:12616–7.1876145110.1021/ja8051427

Aravind P, Nitzan A, Metiu H. The interaction between electromagnetic resonances and its role in spectroscopic studies of molecules adsorbed on colloidal particles or metal spheres. Surf Sci 1981;110:189–204.10.1016/0039-6028(81)90595-1

Jain PK, Huang W, El-Sayed WA. On the universal scaling behavior of the distance decay of plasmon coupling in metal nanoparticle pairs: a plasmon ruler equation. Nano Lett 2007;7:2080–8.10.1021/nl071008a

Greeneltch NG, Blaber MG, Henry A, Schatz GC, Van Duyne RP. Immobilized nanorod assemblies: fabrication and understanding of large area surface-enhanced Raman spectroscopy substrates. Anal Chem 2013;85:2297–303.2334340910.1021/ac303269w

Hatab NA, Chun-Hway H, Gaddis AL, et al. Free-standing optical gold bowtie nano antenna with variable gap size for enhanced Raman spectroscopy. Nano Lett 2010;10:4952–5.10.1021/nl102963g

Jung M, Kim J, Choi Y. Preparation of anodic aluminum oxide masks with size-controlled pores for 2D plasmonic nanodot arrays. J Nanomater 2018;2018:9.

Wang T, Zhang J, Xue P, et al. Nanotransfer printing of gold disk, ring and crescent arrays and their IR range optical properties. J Mater Chem C 2014;2:2333–40.10.1039/c3tc31338g

Xie W, Qiu P, Mao C. Bio-imaging, detection and analysis by using nanostructures as SERS substrates. J Mater Chem 2011;21:5190–202.10.1039/c0jm03301d21625344

Kahraman M, Mullen ER, Korkmaz A, Wachsmann-Hogiu S. Fundamentals and applications of SERS-based bioanalytical sensing. Nanophotonics 2017;6:831–52.10.1515/nanoph-2016-0174

Jeon TY, Kim DJ, Park SG, Ki SH, Kim DH. Nanostructured plasmonic substrates for use as SERS sensors. Nano Convergence 2016:3:18.10.1186/s40580-016-0078-628191428

Sharma B, Frotiera R, Henry A, Ringe R, Van Duyne RP. SERS: Materials applications and the future. Mater Today 2012;5:1–2.

Marks H, Schechinger M, Garza J, Locke A, Cote G. Surface enhanced Raman spectroscopy (SERS) for in vitro diagnostic testing at the point of care. Nanophotonics 2017;6:681–701.

Li M, Cushing SK, Liang H, Suri S, Ma D, Wu N. Plasmonic nanorice antenna on triangle nano-array for surface-enhanced Raman scattering detection of hepatitis B virus DNA. Anal Chem 2013;85:2072–8.10.1021/ac303387a

Zheng P, Kasani S. Shi X, et al. Detection of nitrite with a surface-enhanced Raman scattering sensor based on silver nanopyramid array. Anal Chim Acta 2018;1040:158–65.3032710610.1016/j.aca.2018.08.022

Li M, Cushing SK, Zhang J, et al. Three-dimensional hierarchical plasmonic nano-architecture enhanced surface-enhanced Raman scattering immunosensor for cancer biomarker detection in blood plasma. ACS Nano 2013;7:4967–76.2365943010.1021/nn4018284

Zhang X, Dai Z, Si S, et al. Ultrasensitive SERS substrate integrated with uniform subnanometer scale “hot spots” created by a graphene spacer for the detection of mercury ions. Small 2017;13:1603347.10.1002/smll.201603347

Zhao Y, Zhao S, Zhang L, Liu Y, Li X, Lu Y. A three-dimensional Au nanoparticle-monolayer graphene-Ag hexagon nano-array structure for high-performance surface-enhanced Raman scattering. RSC Adv 2017;7:11904–12.10.1039/C6RA27973B

Gao X, Zheng P, Kasani S, et al. Paper-based surface-enhanced Raman scattering lateral flow strip for detection of neuron-specific enolase in blood plasma. Anal Chem 2017;89:10104–10.2881776910.1021/acs.analchem.7b03015

Li M, Cushing S K, Zhang J, et al. Shape-dependent surface-enhanced Raman scattering in gold-Raman-probe-silica sandwiched nanoparticles for biocompatible applications. Nanotechnology 2012;23:115501–11.10.1088/0957-4484/23/11/11550122383452

Park JE, Lee Y, Nam JM. Precisely shaped, uniformly formed gold nanocubes with ultrahigh reproducibility in single-particle scattering and surface-enhanced Raman scattering. Nano Lett 2018;18:6475–82.3015341310.1021/acs.nanolett.8b02973

Scarabelli L, Coronado-Puchau M, Giner-Casares JJ, Langer J, Liz-Marzá LM. Monodisperse gold nanotriangles: size control, large-scale self-assembly, and performance in surface-enhanced Raman scattering. ACS Nano 2014;8:5833–42.10.1021/nn500727w24848669

Chen S, Liu D, Wang Z, Sun X, Cui D, Chen X. Picomolar detection of mercuric ions by means of gold silver core shell nanorods. Nanoscale 2013;5:6731–5.2379386710.1039/c3nr01603j

Barnes WL, Dereux A, Ebbesen TW. Surface plasmon subwavelength optics. Nature 2003;424:824–30.10.1038/nature0193712917696

Agranovich VM, Mills DL. Surface polaritons: electromagnetic waves at surfaces and interfaces. North-Holland, Amsterdam, 1982.

Boardman AD. Electromagnetic surface modes. Hoboken, NJ, USA, John Wiley & Sons, 1982.

Raether H. Surface plasmons. Springer Tracts in Modern Physics 1988;111:1. Springer.10.1007/BFb0048318

Otto A. Spectra of plasmon polaritons at metal-insulator interfaces of a nanosized gold film: expansion into components and their systematization. Z Phys 1968;216:398–410.

Kretschmann E, Raether H. Radiative decay of nonradiative surface plasmons excited by light z. Nature A 1968;23: 2135–6.

Lackowicz JR. Plasmonics in biology and plasmon-controlled fluorescence. Plasmonics 2006;1:5–33.10.1007/s11468-005-9002-319890454

Dostalek J, Knoll W. Biosensors based on surface plasmon-enhanced fluorescence spectroscopy. Biointerphases 2008;3:12–22.10.1116/1.2994688

Zhang J, Zhang L, Xu W. Surface plasmon polaritons: physics and applications. J Phys D: Appl Phys 2012;45:113001.10.1088/0022-3727/45/11/113001

Ebbesen TW, Lezec H, Ghaemi HF, Thio T, Wolff PA. Extraordinary optical transmission through sub-wavelength hole arrays. Nature 1998;391:667–9.10.1038/35570

Fang Y, Sun M. Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits. Light Sci Appl 2005;4:294.

Zheng P, Cushing SK, Suri S, Wu N. Tailoring plasmonic properties of gold nanohole arrays for surface-enhanced Raman scattering. Phys Chem Chem Phys 2015;17:21211–9.10.1039/C4CP05291A25586930

Kalachyova Y, Mares D, Lyutakov O, Kostejn M, Lapcak L, Svorcik V. Surface plasmon polaritons on silver gratings for optimal SERS response. J Phys Chem C 2015;119:9506–12.10.1021/acs.jpcc.5b01793

Haynes CL, McFarland AD, van Duyne RP. Surface-enhanced: Raman spectroscopy. Analytical Chem 2005;77:338–46.10.1021/ac053456d

Zijlstra P, Chon JWM, Gu M. Five-dimensional optical recording mediated by surface plasmons in gold nanorods. Nature 2009;459:410–3.1945871910.1038/nature08053

Grubisha DS, Lipert R, Park HY, Driskill J, Porter M. Femtomolar detection of prostate-specific antigen: an immunoassay based on surface-enhanced Raman scattering and immunogold labels. Anal Chem 2003;75:5936–43.10.1021/ac034356f14588035

Yun L, Qiang L, Shimeng C, Fang C, Hanqi W, Wei P. Surface plasmon resonance biosensor based on smart phone platforms. Sci Rep 2015;5:12864.2625577810.1038/srep12864

Valsecchi C, Armas LEG, Menezes JW. Large area nanohole arrays for sensing fabricated by interference lithography. Sensors 2019;19:2182.10.3390/s19092182

Brolo AG, Gordon R, Leathem B, Kavanagh KL. Surface plasmon sensor based on the enhanced light transmission through arrays of nanoholes in gold films. Langmuir 2004;20:4813–5.10.1021/la049362115984236

Liang Y, Zhang S, Cao Y, Lu Y, Xu T. Free-standing plasmonic metal-dielectric-metal bandpass filter with high transmission efficiency. Sci Rep 2017;7:4357.10.1038/s41598-017-04540-928659625

Frederich H, Wen F, Laverdant J, et al. Determination of the surface plasmon polariton extraction efficiency from a self-assembled plasmonic crystal. Plasmonics 2014;9:917.10.1007/s11468-014-9697-0

Dhawan A, Canva M, Vo-Dinh T. Narrow groove plasmonic nano-gratings for surface plasmon resonance sensing. Opt Exp 2011;19:787–1.10.1364/OE.19.000787

Lin L. Manipulation of near field propagation and far field radiation of surface plasmon polariton. Singapore: Springer, 2017.

Xiao C, Chen Z, Qin M, Zhang D, Fan L. Composite sinusoidal nanograting with long-range SERS effect for label-free TNT detection. Photonic Sensors 2018;8:278–88.10.1007/s13320-018-0497-6

Chu Y, Banaee MG, Crozier KB. Double-resonance plasmon substrates for surface-enhanced Raman scattering with enhancement at excitation and stokes frequencies. ACS Nano 2010;4:2804–10.2042952110.1021/nn901826q

Du L, Zhang X, Mei T, Yuan X. Localized surface plasmons, surface plasmon polaritons, and their coupling in 2D metallic array for SERS. Optics Exp 2010;18:1959–65.10.1364/OE.18.001959

Wang J, Lin W, Cao E, Xu X, Liang W, Zhan X. Surface plasmon resonance sensors on Raman and fluorescence spectroscopy. Sensors 2017;17:2719.10.3390/s17122719

Miroschnichenko A, Flach S, Kivshar YS. Fano resonances in nanoscale structures. Rev Mod Phys 2010;82:2257–98.10.1103/RevModPhys.82.2257

Fano U. Effects of configuration interaction on intensities and phase shifts. Phys Rev 1961;124:1866–78.10.1103/PhysRev.124.1866

Fano U. On the absorption spectrum of noble gases at the edge of the arc spectrum. Nuovo Cimento 1935;12:154–61.

Giannini V, Fernández-Domínguez AI, Sonnefraud Y, Roschuk T, Fernández-García R, Maier SA. Controlling light localization and light-matter interactions with nanoplasmonics. Small 2010;6:2498–507.2087863710.1002/smll.201001044

Limonov MF, Rybin MV, Poddubny AN, Kivshar YS. Fano resonances in photonics. Nature Photonics 2017;11:543–54.10.1038/nphoton.2017.142

Luk’yanchuk B, Zheludev NI, Maier SA, et al. The Fano resonance in plasmonic nanostructures and metamaterials. Nature Mater 2010;9:707–15.10.1038/nmat2810

Fan JA, Wu C, Bao K, et al. Self-assembled plasmonic nanoparticle clusters. R Science 2010;328:1135–8.

Neubrech F, Pucci A, Cornelius TW, Karim S, García-Etxarri A, Aizpurua J. Resonant plasmonic and vibrational coupling in a tailored nanoantenna for infrared detection. J Phys Rev Lett. 2008;101:157403–7.10.1103/PhysRevLett.101.157403

Shapiro M. Electromagnetically induced transparency with structured multicontinua. Phys Rev A 2007;75:013424–33.10.1103/PhysRevA.75.013424

Neubrech F, Weber D, Enders D, Nagao T, Pucci A. Antenna sensing of surface phonon polaritons. J Phys Chem C 2010;114:7299–301.10.1021/jp908921y

Gallinet B, Lovera A, Siegfried T, Sigg H, Martin OJF. Fano resonant plasmonic systems: Functioning principles and applications. AIP Conf Proc 2012;1475:18–20.

Fano U. The theory of anomalous diffraction grating and of quasi-stationary waves on metallic surfaces (Sommerfeld’s waves). J Opt Soc Am 1941;31:213–22.10.1364/JOSA.31.000213

Ho CC, Zhao K, Lee TY. Quasi-3D gold nanoring cavity arrays with high-density hot-spots for SERS applications via nanosphere lithography. Nanoscale 2014;6:8606–11.10.1039/C4NR00902A24978350

Zhao W, Jiang H, Liu B, Jiang Y, Tang C, Li J. Fano resonance based optical modulator reaching 85% modulation depth. Appl Phys Lett 2015;107:171109.10.1063/1.4935031

Cui A, Liu Z, Li J, et al. Directly patterned substrate-free plasmonic “nanograter” structures with unusual Fano resonances. Light: Sci Appl 2015;4:308.10.1038/lsa.2015.81

Hentschel M, Saliba M, Vogelgesang R, Giessen H, Alivisatos AP, Liu N. Transition from isolated to collective modes in plasmonic oligomers. Nano Lett 2010;10:2721–6.10.1021/nl101938p20586409

Zhao W, Ju D, Jiang Y, Zhan Q. Dipole and quadrupole trapped modes within bi-periodic silicon particle array realizing three-channel refractive sensing. Opt Exp 2014;22:31277–85.10.1364/OE.22.031277

Zhan S, Peng Y, He Z, et al. Tunable nanoplasmonic sensor based on the asymmetric degree of Fano resonance in MDM waveguide. Sci Rep 2016;6:22428.2693229910.1038/srep22428

Huang T, Zeng S, Zhao X, Cheng Z, Shum PP. Fano resonance enhanced surface plasmon resonance sensors operating in near-infrared. Photonics 2018;5:23.10.3390/photonics5030023

Chen J, Gan F, Wang Y, Li G. Plasmonic sensing and modulation based on Fano resonances. Adv Opt Mater 2018;6:1701152.10.1002/adom.201701152

Zhang S, Bao K, Halas N, Xu H, Nordlnader P. Substrate induced Fano resonances of a plasmonic nanosub: a route to increased sensitivity localized surface plasmon resonance sensors revealed. Nano Lett 2011;11:1657–63.10.1021/nl200135r

Cetin AE, Altug H. Fano resonant ring/disk plasmonic nanocavities on conducting substrates for advanced biosensing. ACS Nano 2012;6:9989–95.2309238610.1021/nn303643w

Deng H, Chen X, Xu Y, Miroshnichenko AE. Single protein sensing with asymmetric plasmonic hexamer via Fano resonance enhanced two-photon luminescence. Nanoscale 2015;7:20405–13.10.1039/C5NR04118J26451715

Yanik AA, Cetin AE, Huang M. Seeing protein monolayers with naked eye through plasmonic Fano resonances. Proc Natl Acad Sci USA 2011;108:11784–9.10.1073/pnas.1101910108

Matsko AB, Savchenkov AA, Strekalov D, Ilchenko VS, Maleki L. Review of applications of whispering-gallery mode resonators in photonics and nonlinear optics. IPN Prog Rep 2005;42:1–51.

Matsko AB, Ilchenko VS. Optical resonators with whispering gallery modes I: basics. IEEE J Sel Top Quantum Electron 2006;12:3.10.1109/JSTQE.2005.862952

Ilchenko VS, Matsko AB. Optical resonators with whispering-gallery modes-part II: applications. IEEE J Sel Top Quantum Electron 2006;12:15–32.10.1109/JSTQE.2005.862943

Chiasera A, Dumeige Y, Féron P, et al. Spherical whispering-gallery-mode microresonators. Laser Photonics Rev 2010;4:457–82.10.1002/lpor.200910016

Féron P. Whispering gallery mode lasers in erbium doped fluoride glasses. Ann Fond Louis Brogl 2004;29:317–29.

Foreman MR, Swaim JD, Vollmer F. Whispering gallery mode sensors. Adv Opt Photonics 2015;7:168–240.10.1364/AOP.7.000168

Arnold S, Khoshsima M, Teraoka I. Shift of whispering-gallery modes in microspheres by protein adsorption. Opt Lett 2003;28:272–4.10.1364/OL.28.00027212653369

Vollmer F, Arnold S. Whispering-gallery mode biosensing: label free detection down to the single molecules. Nat Meth 2008;5:591–6.10.1038/nmeth.1221

Vollmer F, Arnold S, Keng D. Single virus detection from the reactive shift of a whispering-gallery mode. Proc Natl Acad Sci USA 2008;105:20701–4.10.1073/pnas.0808988106

Ausman LK, Schatz GC. Whispering-gallery mode resonators: Surface enhanced Raman scattering without plasmons. J Chem Phys 2008;129:054704.10.1063/1.296101218698918

Fan H, Xia C, Fan L, Wang L, Shen M. Graphene supported plasmonic whispering-gallery mode in a metal-coated microcavity for sensing application with ultrahigh sensitivity. Opt Commun 2018;410:668–73.10.1016/j.optcom.2017.11.018

Kang TY, Lee W, Ahn H, et al. Plasmon coupled whispering gallery modes on nanodisk arrays for signal enhancements. Sci Rep 2017;7:11737.2891683510.1038/s41598-017-12053-8

Schweinsberg A, Hodce S, Lepeshkin N, Boyd R, Chase C, Fajardo J. An environmental sensor based on an integrated optical whispering gallery mode risk resonator. Sens Actuators 2007;123:727–32.10.1016/j.snb.2006.10.007

Li C, Teimourpoura MH, McLeod E, Sua J. Enhanced whispering gallery mode sensors. Proc SPIE 2018;10629:201.

Min B, Ostby E, Sorger V. High-Q surface-plasmon-polariton whispering-gallery microcavity. Nature 2009;457:455–8.10.1038/nature0762719158793

Arnold S, Dantham VR, Barbre C, Garetz BA, Fan X. Periodic plasmonic enhancing epitopes on a whispering gallery mode biosensor. Opt Exp 2012;20:26147–59.10.1364/OE.20.026147

Vesseur EJR, Garcia de Abajo FJ, Polman A. Modal decomposition of surface-plasmon whispering gallery resonators. Nano Lett 2009;9:3147–50.10.1021/nl901282619653636

Dantham VR, Holler S, Barbre C, Keng D, Kolchenko V, ArnoldS. Label-free detection of single protein using a nanoplasmonic photonic hybrid microcavity. Nano Lett 2013;13:3347–51.2377744010.1021/nl401633y

Bozzola A, Perotto S, De Angelis F. Hybrid plasmonic-photonic whispering gallery mode resonators for sensing: a critical review. Analyst 2017;142:883–98.2822510010.1039/C6AN02693A

Vahala KJ. Optical microcavities. Nature 2003;424:839–46.10.1038/nature0193912917698

Noda S, Fujita M, Asano T. Spontaneous-emission control by photonic crystals and nanocavities. Nature Photon 2007;1:449–58.10.1038/nphoton.2007.141

Lin LH, Zheng YB. Engineering of parallel plasmonic-photonic interactions for on-chip refractive index sensors. Nanoscale 2015;7:12205–14.2613301110.1039/C5NR03159A

Kravets VG, Kabashin AV, Barnes WL, Grigorenko AN. Plasmonic surface lattice resonances: a review of properties and applications. Chem Rev 2018;118:5912–51.10.1021/acs.chemrev.8b0024329863344

Rajeeva BB, Lin L, Zheng Y. Design and applications of lattice plasmon resonances. Nano Res 2018;11:4423–40.10.1007/s12274-017-1909-4

Humphrey AD, Barnes WL. Plasmonic surface lattice resonances on arrays of different lattice symmetry. Phys Rev B: Condens Matter Mater Phys 2014;90:075404–12.10.1103/PhysRevB.90.075404

Haynes CL, McFarland AD, Zhao LL, et al. Nanoparticle optics: The importance of radiative dipole coupling in two-dimensional nanoparticle arrays. J Phys Chem B 2003;107:7337–42.10.1021/jp034234r

Humphrey A, Meinzer N, Starkey RA, Barnes WL. Surface lattice resonances in plasmonic arrays of asymmetric disc dimers. ACS Photonics 2016;3:634–9.10.1021/acsphotonics.5b00727

Zhukovsky SV, Babicheva VE, Uskov AV, Protsenko IE, Lavrinenko AV. Enhanced electron photoemission by collective lattice resonances in plasmonic nanoparticle-array photodetectors and solar cells. Plasmonics 2014;9:283–9.10.1007/s11468-013-9621-z

Lin L, Zheng Y. Optimizing plasmonic nanoantennas via coordinated multiple coupling. Sci Rep 2015;5:14788.2642301510.1038/srep14788

Ng C, Dligatch S, Amekura H, Davis TJ, Goḿez DE. Waveguide-plasmon polariton enhanced photochemistry. Adv Opt Mater 2015;3:1582–90.10.1002/adom.201500157

Sadeghi SM, Wing WJ, Campbell Q. Tunable plasmonic-lattice mode sensors with ultrahigh sensitivities and figures of merits. J Appl Phys 2016;119:244503–5.10.1063/1.4954681

Gutha R, Sadeghi S, Sharp C, Wing WJ. Biological sensing using hybridization phase of plasmonic resonances with photonic lattice modes in arrays of gold nanoantennas. Nanotechnology 2017;28:355504–11.10.1088/1361-6528/aa7bb528649962

Kuznetsov AI, Evlyukhin AB, Goncalves MR, et al. Laser fabrication of large-scale nanoparticle arrays for sensing applications. ACS Nano 2011;5:4843–9.2153937310.1021/nn2009112

Lin LH, Zheng YB. Optimizing plasmonic nanoantennas via coordinated multiple coupling. Sci Rep 2015;5:14788.2642301510.1038/srep14788

Shen Y, Zhou JH, Liu TR, et al. Plasmonic gold mushroom arrays with refractive index sensing figures of merit approaching the theoretical limit. Nat Commun 2013;4:2381.10.1038/ncomms338123979039

Li ZY, Butun S, Aydin K. Ultranarrow band absorbers based on surface lattice resonances in nanostructured metal surfaces. ACS Nano 2014;8:8242–8.10.1021/nn502617t25072803

Bahramipanah M, Dutta-Gupta S, Abasahl B, Martin OJF. Cavity-coupled plasmonic device with enhanced sensitivity and figure-of-merit. ACS Nano 2015;9:7621–33.10.1021/acsnano.5b0297726131684

Søndergaard T, Jung J, Bozhevolnyi SI, Della Valle G. Theoretical analysis of gold nano-strip gap plasmon resonators. N J Phys 2008;10:105008.10.1088/1367-2630/10/10/105008

Li GC, Zhang YL, Lei DY. Hybrid plasmonic gap modes in metal film-coupled dimers and their physical origins revealed by polarization resolved dark field spectroscopy. Nanoscale 2016;8:7119–26.10.1039/C5NR09260D26962966

Cesario J, Quidant R, Badenes G, Enoch S. Electromagnetic coupling between a metal nanoparticle grating and a metallic surface. Opt Lett 2005;30:3404–6.10.1364/OL.30.003404

Norlander P, Le F. Plasmonic structure and electromagnetic field enhancements in the metallic nanoparticle-film system. Appl Phys B 2006;84:35–41.10.1007/s00340-006-2203-4

Bozhevolnyi SI. Effective-index modeling of channel plasmon polaritons. Opt Exp 2006;14:9467–76.10.1364/OE.14.009467

Søndergaard T, Bozhevolnyi S. Slow-plasmon resonant nanostructures scattering and field enhancements. Phys Rev B 2007;75:073402–8.10.1103/PhysRevB.75.073402

Chang SW, Lin TR, Chuang SL. Theory of plasmonic Fabry-Perot nanolasers. Opt Exp 2010;18:15039–53.10.1364/OE.18.015039

Fang Z, Zhen YR, Fan L, Zhu X, Nordlander P. Tunable wide-angle plasmonic perfect absorber at visible frequencies. Phys Rev B 2012;85:245401.10.1103/PhysRevB.85.245401

Dutta A, Naldoni A, Malara F, Govorov AO, Shalaev V, Boltasseva A. Gap-plasmon enhanced water splitting with ultrathin hematite films: the role of plasmonic-based light trapping and hot electrons. Faraday Discuss 2019;214:283–95.

Fofang NT, Grady NK, Fan Z, Govorov AO, Halas NJ. Plexciton Dynamics: exciton plasmon coupling in a J-aggregate Au nanoshell complex provides a mechanism for nonlinearity. Nano Lett 2011;11:1556–60.10.1021/nl104352j

Sivashanmugana K, Huang WL, Lina CH, et al. Bimetallic nanoplasmonic gap-mode SERS substrate for lung normal and cancer-derived exosomes detection. J Taiwan Inst Chem Eng 2017;80:149–55.10.1016/j.jtice.2017.09.026

Kubo W, Fujikawa S. Au double nanopillars with nanogap for plasmonic sensor. Nano Lett 2011;11:8–15.10.1021/nl100787b21114297

Shao F, Lu Z, Liu C, et al. Hierarchical nanogaps within bioscaffold arrays as a high- performance SERS substrate for animal virus biosensing. ACS Appl Mater Interfaces 2014;6:6281–9.2435953710.1021/am4045212

Wu N. Plasmonic metal-semiconductor photocatalysts and photoelectrochemical cells: a review. Nanoscale 2018;10:2679–96.10.1039/C7NR08487K