A piezoelectric-drive table and its application to micro-grinding of ceramic materials

Precision Engineering - Tập 12 - Trang 219-226 - 1990
K. Mizutani1, T. Kawano1, Y. Tanaka2
1Osaka Prefectural Industrial Technology Research Institute, 2-1-53, Enokojima, Nishiku, Osaka, 550 Japan
2College of Engineering, University of Osaka Prefecture, Sakai 591 Japan

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