A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms

Oralkan, 2002, Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 49, 1596, 10.1109/TUFFC.2002.1049742

Logan, 2009, Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-based wafer bonding process, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 56, 1074, 10.1109/TUFFC.2009.1141

Puers, 1996, Electrostatic forces and their effects on capacitive mechanical sensors, Sens. Actuators A Phys., 56, 203, 10.1016/S0924-4247(96)01310-6

Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, B.T. Khuri-Yakub, Optimized membrane configuration improves CMUT performance, in: Proc. IEEE Ultrason. Symp., 2004, pp. 505–508.

S. Zhou, P. Reynolds, J.A. Hossack, Improving the performance of capacitive micromachined ultrasound transducers using modified membrane and support structures, in: Proc. IEEE Ultrason. Symp, 2005, pp. 1925–1928.

Onen, 2012, Detailed investigation of capacitive micromachined ultrasonic transducer design space, Microsyst. Technol., 18, 399, 10.1007/s00542-012-1449-5

P.-C. Eccardt, P. Wagner, S. Hansen, Analytical models for micromachined transducers-an overview, in: Proc. IEEE Ultrason. Symp., 2006, pp. 572–581.

I.O. Wygant, M. Kupnik, B.T. Khuri-Yakub, Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell, in: Proc. IEEE Ultrason. Symp., 2008, pp. 2111–2114.

Lohfink, 2005, Linear and nonlinear equivalent circuit modeling of CMUTs, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 52, 2163, 10.1109/TUFFC.2005.1563260

Anbalagan, 2006, Modeling and simulation of capacitive micromachined ultrasonic transducer (CMUT), J. Phys.: Conf. Ser., 34, 595

Köymen, 2007, Parametric linear modeling of circular CMUT membranes in Vacuum, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 54, 2163, 10.1109/TUFFC.2007.376

S. Timoshenko, S. Woinosky-Krieger, Theory of Plates and Shells, McGraw Hill Classic Textbook Reissue, second ed., 1959.

Maier-Schneider, 1995, A new analytical solution for the load-deflection of square membranes, J. Microelectromech. Syst., 4, 238, 10.1109/84.475551

M. Rahman, S. Chowdhury, A new deflection shape function for square membrane CMUT design, in: Proc. IEEE Int. Symp. Circuits Syst., 2010, pp. 2019–2022.

Rahman, 2011, Square diaphragm CMUT capacitance calculation using a new deflection shape function, J. Sens., 1, 10.1155/2011/581910

Senturia, 2001

A. Lohfink, P.-C. Eccardt, W. Benecke, H. Meixner, Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulation, in: Proc. IEEE Ultrason. Symp, 2003, pp. 465–468.

Bayram, 2005, Dynamic analysis of capacitive micromachined ultrasonic transducers, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 52, 2270, 10.1109/TUFFC.2005.1563269

Yaralioglu, 2005, Finite-element analysis of capacitive micromachined ultrasonic transducers, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 52, 2185, 10.1109/TUFFC.2005.1563262

G.G. Yaralioglu, B. Bayram, A. Nikoozadeh, B.T. Khuri-Yakub, Finite element modeling of capacitive micromachined ultrasonic transducers, in: Proc. SPIE, 2005, pp. 77–86.

Qian, 2010, A new 2-D model of a thin annular disk using a modified assumption, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 57, 421, 10.1109/TUFFC.2010.1422

Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, B.T. Khuri-Yakub, Optimized membrane configuration improves CMUT performance, in: Proc. IEEE Ultrasonics Symp., 2004, pp. 505–508.

Huang, 2009, Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 56, 136, 10.1109/TUFFC.2009.1013