A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

Noguchi, 1989, The Development of an interferometer for calibrating linear scales, Mitutoyo Tech. Bull., 5, 26 Sawabe M, Noguchi H, Makino T. An interferometer for measurement of grating and index scale, progress in precision engineering. In: Proceedings of the 6th IPES and 2nd IC on UME. Braunschweig, Germany: 1991. p. 308–10. Yoshiike K. The measurement environment nine meters underground, Mitutoyo technical information no. STD-008; 1990. Sawabe M, Ohta S, Hiroshima S. Traceability of optical length measurements. In: Proceedings of SPIE Vol. 954, Optical Testing and Metrology II. Dearborn, USA: 1988. p. 448–54. Ueda M, Numata A, Sawabe M. Calibrated wavelength results of commercial stabilized He–Ne leasers. In: Proceeding of 1997 National Conference of Standard Laboratory. Atlanta, USA: 1997. p. 775–84. Israel, 2003, An international length comparison at an industrial level using a photoelectric incremental encoder as transfer standard, Precision Eng., 27, 151, 10.1016/S0141-6359(02)00192-7