A new process for the fabrication of miniature Fabry Perot spectrometers

Mechatronics - Tập 8 - Trang 485-504 - 1998
Paul M. Zavracky1, Erwin Hennenberg1, Kevin Denis1, Huikai Xi1
1Northeastern University, Department of Electrical and Computer Engineering, Boston, Massachusetts, U.S.A.

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