A method of fine size measurement for telecentricity-based error compensation

Measurement Science and Technology - Tập 32 Số 10 - Trang 105015 - 2021
Wenjie Li, Haiwang Wang, Rongjiang Tang, Zhansi Jiang, Tengfei Li, Meikuan Huang, Xingyu Gao

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Tài liệu tham khảo

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