A diagnostic study of plasma CVD under microgravity and its application to diamond deposition

Advances in Space Research - Tập 24 - Trang 1219-1223 - 1999
M. Ishikawa1, S. Kamei1, Y. Sato2, N. Fujimori3, N. Koshikawa4, K. Murakami4, T. Suzuki4
1Mitsubishi Research Institute, Inc. 2-3-6, Otemachi, Chiyoda-ku, Tokyo 100, Japan
2National Institute for Research in Inorganic Materials, 1-1 Namiki, Tsukuba, Ibaraki 305, Japan
3Sumitomo Electric Industries 1-1-1, Koyakita, Itami, Hyogo 664, Japan
4National Space Development Agency of Japan 2-1-1, Sengen, Tsukuba, Ibaraki 305, Japan

Tài liệu tham khảo

Celle, 1990, 17 Derjaguin, 1976, Sov. Phys., 52, 676 Matsumoto, 1982, Jpn. J. Appl. Phys., 42, L183, 10.1143/JJAP.21.L183 Ota, 1990, Sumitomodenki, 137, 206 Spitsyn, 1990, Diamond films, 1 Suzuki, 1990, Jpn. J. Appl. Phys., 29, 153, 10.1143/JJAP.29.153 Tourin, 1966
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Advances in Space Research

Tập 24

1219-1223

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