A data-driven approach to selection of critical process steps in the semiconductor manufacturing process considering missing and imbalanced data

Journal of Manufacturing Systems - Tập 52 - Trang 146-156 - 2019
Dong-Hee Lee1, Jin-Kyung Yang1, Cho-Heui Lee1, Kwang-Jae Kim2
1Division of Interdisciplinary Industrial Studies, Hanyang University, Seoul, Republic of Korea
2Department of Industrial and Management Engineering, Pohang University of Science and Technology, Pohang, Republic of Korea

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