A cathodic arc enhanced middle-frequency magnetron sputter system for deposition of hard protective coatings

Nuclear Science and Techniques - Tập 17 - Trang 135-138 - 2006
Zhi-Hong HUANG1, Bing YANG1, Xiang-Jun FAN1, De-Jun FU1
1Accelerator Laboratory, Department of Physics, Wuhan University, Wuhan 430072, China