A Study on PCD Tool Surface Reconditioning Technique for SiC Micromachining
Tài liệu tham khảo
D. Dornfeld, S. Min, Y. Takeuchi : Recent Advances in Mechanical Micromachining, Annals of the CIRP, 55 (2006), pp. 745-768.
L. Yin, E.Y. Vancoille, L.C. Lee, H. Huang, K. Ramesh, X.D. Liu : High-quality grinding of polycrystalline silicon carbide spherical surfaces, Wear, 256 (2004), pp. 197-207.
F. Klocke, R. Zunke : Removal mechanisms in polishing of silicon based advanced ceramics, Annals of the CIRP, 58 (2009), pp. 491-494.
J. Yan, Z. Zhang, T. Kuriyagawa : Tool wear control in diamond turning of high-strength mold materials by means of tool swinging, Annals of the CIRP, 59 (2010), pp. 109-112.
H. Suzuki, T. Moriwaki, Y. Yamamoto, Y. Goto : Precision Cutting of Aspherical Ceramic Molds with Micro PCD Milling Tool, Annals of the CIRP, 56 (2007), pp. 131-134.
X. Cheng, K. Nakamoto, M. Sugai, S. Matsumoto, Z.G. Wang, K. Yamazaki : Development of ultra-precision machining system with unique wire EDM tool fabrication system for micro/nano-machining, Annals of the CIRP, 57 (2008), pp. 415-420.
Z. Zhang, H. Peng, J. Yan : Micro-cutting characteristics of EDM fabricated high-precision polycrystalline diamond tools, International Journal of Machine Tools & Manufacturing, 65 (2013), pp. 99-106.
K. Katahira, K. Nakamoto, P. Fonda, H. Ohmori, K. Yamazaki : A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining, Annals of the CIRP, 60 (2011), pp. 591-594.
K. Nakamoto, K. Katahira, H. Ohmori, K. Yamazaki, T. Aoyama : A study on the quality of micro-machined surfaces on tungsten carbide generated by PCD micro end-milling, Annals of the CIRP, 61 (2012), pp. 567-570.
T. G. Bifano, T.A. Dow, R.O. Scattergood : Ductile-Regime Grinding : A New Technology For Machining Brittle Materials, Transactions of the ASME, 113 (1991), pp. 184-189.
S. Yin, W. Lin, H. Ohmori, Y. Uehara, M. Asami : Study on ultraprecision synergistic finishing process of ELID-grinding and MRF 2nd Report : Finishing characteristics of CVD-SiC, Journal of the Japan Society for Abrasive Technology, 50 (2006), pp. 324-327.(in Japanese).
D. S. Fox : Oxidation Behavior of Chemically-Vapor Deposited Silicon Carbide and Silicon Nitride from 1200̊ to 1600̊, Journal of the American Ceramic Society, 81 (1998), pp. 945-950.
S. Goel, X. Luo, R.L. Reuben : Molecular dynamics simulation model for the quantitative assessment of tool wear during single point diamond turning cubic silicon carbide, Computation Material Science, 51 (2012), pp. 402-408.
H. Seidel, L. Csepregi, A. Heuberger, H. Baumgartel : Anisotropic Etching of Crystalline Silicon in Alkaline Solutions, Journal of The Electrochemical Society, 137 (1990), pp. 3612-3626.