A Micromachined Drop Dispenser for Biofluidics

Springer Science and Business Media LLC - 2002
Steve P. Swierkowski1
1Lawrence Livermore National Laboratory, d, Livermore, USA

Tóm tắt

A micromachined drop dispenser for biofluidic applications has been fabricated and tested. It uses anisotropic etching of silicon and anodic bonding to pyrex wafers to form the flow channels, fluid wells, and nozzles. The ejected fluid comes from a fluid well that is externally compressed by a PZT bimorph that compresses a thin silicon membrane wall on the driven fluid well. This device design is amenable to arrays of dispensers although only one channel was fluid tested. It produced uniform droplets 150 µm in diameter.

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