A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

Engineering - Tập 3 - Trang 708-715 - 2017
Zhen Zhang1,2,3, Peng Yan4, Guangbo Hao5
1State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Tsinghua University, Beijing 100084, China
2Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, Beijing 100084, China
3Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
4Key Laboratory of High-Efficiency and Clean Mechanical Manufacturing, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan 250061, China
5Department of Electrical and Electronic Engineering, University College Cork, Cork, Ireland

Tài liệu tham khảo

Ikuta K, Hirowatari K. Real three dimensional micro fabrication using stereo lithography and metal molding. In: Proceedings of the IEEE International Workshop on Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems; 1993 Feb 7–10; Fort Lauderdale, FL, USA. Piscataway: The Institute of Electrical and Electronics Engineers, Inc.; 1993. p. 42–7. Ikuta K, Maruo S, Kojoma S. New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution. In: Proceedings of the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems; 1998 Jan 25–29; Heidelberg, Germany. Piscataway: The Institute of Electrical and Electronics Engineers, Inc., 1998. p. 290–5. Choi, 2009, Development of micro-stereolithography technology using a UV lamp and optical fiber, Int J Adv Manuf Tech, 41, 281, 10.1007/s00170-008-1461-1 Shoji, 1999, Photofabrication of a photonic crystal using interference of a UV laser, Proc SPIE, 3740, 541, 10.1117/12.347738 Neumann, 1999, Direct laser writing of surface reliefs in dry, self-developing photopolymer films, Appl Opt, 38, 5418, 10.1364/AO.38.005418 Straub, 2003, Multiple higher-order stop gaps in infrared polymer photonic crystals, Phys Rev Lett, 91, 043901, 10.1103/PhysRevLett.91.043901 Bertsch, 1997, Microstereophotolithography using a liquid crystal display as dynamic mask-generator, Microsyst Technol, 3, 42, 10.1007/s005420050053 Vaezi, 2013, A review on 3D micro-additive manufacturing technologies, Int J Adv Manuf Tech, 67, 1721, 10.1007/s00170-012-4605-2 Xu, 2006, Novel stereolithography system for small size objects, Rapid Prototyping J, 12, 12, 10.1108/13552540610637228 Roy NK, Cullinan MA. μ-SLS of metals: Design of the powder spreader, powder bed actuators and optics for the system. In: Proceedings of the 26th Annual International Solid Freeform Fabrication Symposium—An Additive Manufacturing Conference; 2015 Aug 10–12; Austin, TX, USA. Austin: University of Texas at Austin; 2015. p. 134–55. Awtar, 2013, Design of a large range XY nanopositioning system, J Mech Robot, 5, 021008, 10.1115/1.4023874 Xu, 2014, Design and development of a compact flexure-based XY precision positioning system with centimeter range, IEEE Trans Ind Electron, 61, 893, 10.1109/TIE.2013.2257139 Zhou, 2016, Precision design and control of a flexure-based roll-to-roll printing system, Precis Eng, 45, 332, 10.1016/j.precisioneng.2016.03.010 Kang, 2012, Development of a compact micro-stereolithography (MSTL) system using a Blu-ray optical pickup unit, J Micromech Microeng, 22, 115021, 10.1088/0960-1317/22/11/115021 Hao, 2016, Design, modelling and analysis of a completely-decoupled XY compliant parallel manipulator, Mech Mach Theory, 102, 179, 10.1016/j.mechmachtheory.2016.04.006 Zhang Z, Liu Z, Yan P. Design of a flexure-based XY positioning stage with balanced axial forces on decoupling modules. In: Proceedings of the 6th International Conference on Manipulation, Manufacturing, Measurement on the Nanoscale; 2016 Jul 18–22; Chongqing, China. Piscataway: The Institute of Electrical and Electronics Engineers, Inc.; 2016. p. 83–8. Yu, 2015, Design and experimental testing of an improved large-range decoupled XY compliant parallel micromanipulator, J Mech Robot, 7, 044503, 10.1115/1.4030467 Zhang, 2016, A beam flexure-based nanopositioning stage supporting laser direct-write nanofabrication, Sci China Phys Mech Astron, 59, 684211, 10.1007/s11433-016-0132-x Awtar, 2007, Characteristics of beam-based flexure modules, J Mech Design, 129, 625, 10.1115/1.2717231