A CEMS apparatus for in situ studies of ion beam modified metals

An apparatus for CEMS studies of ion beam modified metals is described. The spectrometer can be coupled directly to the ion implanter. During ion bombardement the sample can be cooled to liquid nitrogen temperature or heated to about 500 K. CEMS measurements can be taken directly after ion beam modification between room temperature and liquid nitrogen temperature. As a first test of the performance of the apparatus CEMS spectra of boron-ion implanted iron at room temperature are presented.